One-step Maskless Fabrication and Optical Characterization of Silicon Surfaces with Antireflective Properties and a White Color Appearance.

We report a simple one-step maskless fabrication of inverted pyramids on silicon wafers by reactive ion etching. The fabricated surface structures exhibit excellent anti-reflective properties: The total reflectance of the nano inverted pyramids fabricated by our method can be as low as 12% without any anti-reflective layers, and down to only 0.33% with a silicon nitride coating. The results from angle resolved scattering measurements indicate that the existence of triple reflections is responsible for the reduced reflectance. The surfaces with the nano inverted pyramids also exhibit a distinct milky white color.

The Influence of Structure Heights and Opening Angles of Micro- and Nanocones on the Macroscopic Surface Wetting Properties.

We discuss the influence of surface structure, namely the height and opening angles of nano- and microcones on the surface wettability. We show experimental evidence that the opening angle of the cones is the critical parameter on sample superhydrophobicity, namely static contact angles and roll-off angles. The textured surfaces are fabricated on silicon wafers by using a simple one-step method of reactive ion etching at different processing time and gas flow rates. By using hydrophobic coating or hydrophilic surface treatment, we are able to switch the surface wettability from superhydrophilic to superhydrophobic without altering surface structures. In addition, we show examples of polymer replicas (polypropylene and poly(methyl methacrylate) with different wettability, fabricated by injection moulding using templates of the silicon cone-structures.

Superhydrophobic Properties of Nanotextured Polypropylene Foils Fabricated by Roll-to-Roll Extrusion Coating.

We demonstrate the use of roll-to-roll extrusion coating (R2R-EC) for fabrication of nanopatterned polypropylene (PP) foils with strong antiwetting properties. The antiwetting nanopattern is originated from textured surfaces fabricated on silicon wafers by a single-step method of reactive ion etching with different processing gas flow rates. We provide a systematic study of the wetting properties for the fabricated surfaces and show that a controlled texture stretching effect in the R2R-EC process is instrumental to yield the superhydrophobic surfaces with water contact angles approaching 160° and droplet roll-off angles below 10°.