Room temperature wafer bonding through conversion of polysilazane into [Formula: see text].

Room temperature wafer bonding is a desirable approach for the packaging and assembly of diverse electronic devices. The formation of [Formula: see text] layer at the bonding interface is crucial for a reliable wafer bonding as represented by conventional bonding techniques such as hydrophilic bonding and glass frit bonding. This paper reports a novel concept of room temperature wafer bonding based on the conversion of polysilazane to [Formula: see text] at the bonding interface. As polysilazane is converted to [Formula: see text] by hydrolysis, in this work, adsorbed water is introduced to the bonding interface by plasma treatment, thereby facilitating the formation of [Formula: see text] at the wafer bonding interface. The experimental results indicate that the adsorbed water from the plasma treatment diffuses into the polysilazane layer and facilitates its hydrolysis and conversion. The proposed method demonstrates the successful wafer bonding at room temperature with high bond strength without interfacial voids. This technique will provide a new approach of bonding wafers at room temperature for electronics packaging.

Microfluidic chip connected to porous microneedle array for continuous ISF sampling.

Minimally invasive biosensing using microneedles (MNs) is a desirable technology for continuous healthcare monitoring. Among a wide range of MNs, porous MNs are expected to be applied for sampling of interstitial fluids (ISF) by connecting the internal tissue to external measurement devices. In order to realize a continuous measurement of biomarkers in ISF through porous MNs, their integration with a microfluidic chip is a promising approach due to its applicability to micro-total analysis system (µTAS) technology. In this study, we developed a fluidic system to directly interface porous MNs to a microfluidic chip consisting of a capillary pump for the continuous sampling of ISF. The porous and flexible MNs made of PDMS are connected to the microfluidic chip fabricated by standard microelectro-mechanical system (MEMS) processes, showing a continuous flow of phosphate buffered saline (PBS). The developed device will lead to the minimally invasive and continuous biosampling for long-term healthcare monitoring.

Flexible and porous microneedles of PDMS for continuous glucose monitoring.

Microneedle (MN) is a key technology of the biomedical engineering field due to its capability of accessing the biological information in a minimally invasive manner. One of the huge demands for next-generation healthcare monitoring is continuous monitoring, especially of blood glucose concentration. For this, MN should be kept inserted into the human skin for a certain period of time, enduring stresses induced by daily human motion and at the same time measuring biomarkers in ISF. However, conventional MNs for biosensing are not suitable for a long term insertion due to the rigid structure and biological risks of MN breakage. In this study, a novel MN structure is proposed and investigated by combining flexible "sponge-like" porous PDMS matrix and coating by biodissolving hyaluronic acid (HA). The fabricated porous MNs coated with HA show ideal mechanical characteristics, by which the MNs are rigid enough to penetrate the skin and become flexible after insertion into the skin. It is also shown that the MN array successfully extracts ISF in vitro and in vivo not by capillary action but by repeated compressions. The results show the applicability of the flexible MNs to continuous blood glucose monitoring.

Microfluidic chip to interface porous microneedles for ISF collection.

Porous microneedles (MNs) are expected to be applied for diagnostic microfluidic devices such as blood glucose monitoring as they enable a pain-free penetration of human skin and the extraction of interstitial fluids. However, conventional microfluidic systems require additional steps to separate the liquid from a porous structure used for fluid extraction. In this study, we developed a microfluidic system with a hydrodynamically designed interface between a porous MN array and microchannels to enable a direct analysis of liquids extracted by the porous MN array. The microfluidic chip with an interface for the MN array was successfully realized by standard MEMS processes, enabling a liquid flow through the whole microfluidic structure. The porous MN array was fabricated by the salt leaching and molding method, which was integrated with the chip and demonstrated the successful extraction of liquids from an agarose gel-based skin phantom.

Correction to: Functionalized microneedles for continuous glucose monitoring.

After publication of this article [1], the author noticed there are some conversion errors with the below characters and units in the article body text. The corrections are detailed below.

Functionalized microneedles for continuous glucose monitoring.

Microneedles (MNs) have been established as promising medical devices as they are minimally invasive, cause less pain, and can be utilized for self-administration of drugs by patients. There has been rapid development in MNs for transdermal monitoring and diagnostic systems, following the active research on fabrication methods and applications for drug delivery. In this paper, recent investigations on bio-sensing using MNs are reviewed in terms of the applicability to continuous glucose monitoring system (CGMS), which is one of the main research focuses of medical engineering technologies. The trend of the functionalized MNs can be categorized as follows: (i) as a sensing probe, and (ii) as a biological fluid collector. MNs as in vivo sensors are mainly integrated or coated with conductive materials to have the function as electrodes. MNs as fluid collectors are given a certain geometrical design, such as a hollow and porous structure aided by a capillary action or negative pressure, to extract the interstitial fluids or blood for ex vivo analysis. For realization of CGMS with MNs, a long-term accurate measurement by the MN-based sensing probe or a fluidic connection between the MN-based fluid collector and the existing microfluidic measurement systems should be investigated.

Influence of chewing time on salivary stress markers.

PURPOSE: We investigated the influence of chewing time on salivary stress markers. METHODS: Participants performed arithmetic calculations for 30min as stress loading, followed by chewing for 0, 5, 10, or 15min. All experiments finished at 25min after stress loading. With 0-min chewing, saliva was collected before stress loading (BS), immediately after stress loading (R0), and at 5, 10, 15, and 25min after stress loading (R5, 10, 15 and 25). With 5, 10, or 15min chewing, saliva was collected at BS and R0, immediately after chewing (Ch5, 10 and 15, respectively), and 25min after stress loading (Ch5R25, Ch10R25 and Ch15R25, respectively). Salivary alpha-amylase activity and cortisol levels were measured to evaluate stress. Change in stress markers between R0 and Ch5, 10 and 15 or R25, Ch5R25, Ch10R25 and Ch15R25 were calculated. RESULTS: No significant differences were observed in rate of change in alpha-amylase activity among the chewing conditions. Rate of decrease in cortisol levels was significantly greater at 15-min chewing than at 5-min chewing. Rate of decrease in cortisol levels was significantly greater at 10 and 15-min chewing than at 0-min chewing. CONCLUSION: The present results indicate that chewing time affects the reaction of the endocrine system to mental stress, and that continuous chewing for more than 10min is effective in reducing stress.