Multimodality integrated microresonators using the Moiré speedup effect.

High-Q microresonators are indispensable components of photonic integrated circuits and offer several useful operational modes. However, these modes cannot be reconfigured after fabrication because they are fixed by the resonator's physical geometry. In this work, we propose a Moiré speedup dispersion tuning method that enables a microresonator device to operate in any of three modes. Electrical tuning of Vernier coupled rings switches operating modality to Brillouin laser, bright microcomb, and dark microcomb operation on demand using the same hybrid-integrated device. Brillouin phase matching and microcomb operation across the telecom C-band is demonstrated. Likewise, by using a single-pump wavelength, the operating mode can be switched. As a result, one universal design can be applied across a range of applications. The device brings flexible mixed-mode operation to integrated photonic circuits.

Photonic chip-based low-noise microwave oscillator.

Numerous modern technologies are reliant on the low-phase noise and exquisite timing stability of microwave signals. Substantial progress has been made in the field of microwave photonics, whereby low-noise microwave signals are generated by the down-conversion of ultrastable optical references using a frequency comb1-3. Such systems, however, are constructed with bulk or fibre optics and are difficult to further reduce in size and power consumption. In this work we address this challenge by leveraging advances in integrated photonics to demonstrate low-noise microwave generation via two-point optical frequency division4,5. Narrow-linewidth self-injection-locked integrated lasers6,7 are stabilized to a miniature Fabry-Pérot cavity8, and the frequency gap between the lasers is divided with an efficient dark soliton frequency comb9. The stabilized output of the microcomb is photodetected to produce a microwave signal at 20 GHz with phase noise of -96 dBc Hz-1 at 100 Hz offset frequency that decreases to -135 dBc Hz-1 at 10 kHz offset-values that are unprecedented for an integrated photonic system. All photonic components can be heterogeneously integrated on a single chip, providing a significant advance for the application of photonics to high-precision navigation, communication and timing systems.

AlGaAs soliton microcombs at room temperature.

Soliton mode locking in high-Q microcavities provides a way to integrate frequency comb systems. Among material platforms, AlGaAs has one of the largest optical nonlinearity coefficients, and is advantageous for low-pump-threshold comb generation. However, AlGaAs also has a very large thermo-optic effect that destabilizes soliton formation, and femtosecond soliton pulse generation has only been possible at cryogenic temperatures. Here, soliton generation in AlGaAs microresonators at room temperature is reported for the first time, to the best of our knowledge. The destabilizing thermo-optic effect is shown to instead provide stability in the high-repetition-rate soliton regime (corresponding to a large, normalized second-order dispersion parameter D2/κ). Single soliton and soliton crystal generation with sub-milliwatt optical pump power are demonstrated. The generality of this approach is verified in a high-Q silica microtoroid where manual tuning into the soliton regime is demonstrated. Besides the advantages of large optical nonlinearity, these AlGaAs devices are natural candidates for integration with semiconductor pump lasers. Furthermore, the approach should generalize to any high-Q resonator material platform.

3D integration enables ultralow-noise isolator-free lasers in silicon photonics.

Photonic integrated circuits are widely used in applications such as telecommunications and data-centre interconnects1-5. However, in optical systems such as microwave synthesizers6, optical gyroscopes7 and atomic clocks8, photonic integrated circuits are still considered inferior solutions despite their advantages in size, weight, power consumption and cost. Such high-precision and highly coherent applications favour ultralow-noise laser sources to be integrated with other photonic components in a compact and robustly aligned format-that is, on a single chip-for photonic integrated circuits to replace bulk optics and fibres. There are two major issues preventing the realization of such envisioned photonic integrated circuits: the high phase noise of semiconductor lasers and the difficulty of integrating optical isolators directly on-chip. Here we challenge this convention by leveraging three-dimensional integration that results in ultralow-noise lasers with isolator-free operation for silicon photonics. Through multiple monolithic and heterogeneous processing sequences, direct on-chip integration of III-V gain medium and ultralow-loss silicon nitride waveguides with optical loss around 0.5 decibels per metre are demonstrated. Consequently, the demonstrated photonic integrated circuit enters a regime that gives rise to ultralow-noise lasers and microwave synthesizers without the need for optical isolators, owing to the ultrahigh-quality-factor cavity. Such photonic integrated circuits also offer superior scalability for complex functionalities and volume production, as well as improved stability and reliability over time. The three-dimensional integration on ultralow-loss photonic integrated circuits thus marks a critical step towards complex systems and networks on silicon.

Hydroxyl ion absorption in on-chip high-Q resonators.

Thermal silica is a common dielectric used in all-silicon photonic circuits. Additionally, bound hydroxyl ions (Si-OH) can provide a significant component of optical loss in this material on account of the wet nature of the thermal oxidation process. A convenient way to quantify this loss relative to other mechanisms is through OH absorption at 1380 nm. Here, using ultra-high-quality factor (Q-factor) thermal-silica wedge microresonators, the OH absorption loss peak is measured and distinguished from the scattering loss baseline over a wavelength range from 680 nm to 1550 nm. Record-high on-chip resonator Q-factors are observed for near-visible and visible wavelengths, and the absorption limited Q-factor is as high as 8 billion in the telecom band. Hydroxyl ion content level around 2.4 ppm (weight) is inferred from both Q measurements and by secondary ion mass spectroscopy (SIMS) depth profiling.

Chip-based laser with 1-hertz integrated linewidth.

Lasers with hertz linewidths at time scales of seconds are critical for metrology, timekeeping, and manipulation of quantum systems. Such frequency stability relies on bulk-optic lasers and reference cavities, where increased size is leveraged to reduce noise but with the trade-off of cost, hand assembly, and limited applications. Alternatively, planar waveguide-based lasers enjoy complementary metal-oxide semiconductor scalability yet are fundamentally limited from achieving hertz linewidths by stochastic noise and thermal sensitivity. In this work, we demonstrate a laser system with a 1-s linewidth of 1.1 Hz and fractional frequency instability below 10-14 to 1 s. This low-noise performance leverages integrated lasers together with an 8-ml vacuum-gap cavity using microfabricated mirrors. All critical components are lithographically defined on planar substrates, holding potential for high-volume manufacturing. Consequently, this work provides an important advance toward compact lasers with hertz linewidths for portable optical clocks, radio frequency photonic oscillators, and related communication and navigation systems.

Integrated Pockels laser.

The development of integrated semiconductor lasers has miniaturized traditional bulky laser systems, enabling a wide range of photonic applications. A progression from pure III-V based lasers to III-V/external cavity structures has harnessed low-loss waveguides in different material systems, leading to significant improvements in laser coherence and stability. Despite these successes, however, key functions remain absent. In this work, we address a critical missing function by integrating the Pockels effect into a semiconductor laser. Using a hybrid integrated III-V/Lithium Niobate structure, we demonstrate several essential capabilities that have not existed in previous integrated lasers. These include a record-high frequency modulation speed of 2 exahertz/s (2.0 × 1018 Hz/s) and fast switching at 50 MHz, both of which are made possible by integration of the electro-optic effect. Moreover, the device co-lases at infrared and visible frequencies via the second-harmonic frequency conversion process, the first such integrated multi-color laser. Combined with its narrow linewidth and wide tunability, this new type of integrated laser holds promise for many applications including LiDAR, microwave photonics, atomic physics, and AR/VR.

Probing material absorption and optical nonlinearity of integrated photonic materials.

Optical microresonators with high quality (Q) factors are essential to a wide range of integrated photonic devices. Steady efforts have been directed towards increasing microresonator Q factors across a variety of platforms. With success in reducing microfabrication process-related optical loss as a limitation of Q, the ultimate attainable Q, as determined solely by the constituent microresonator material absorption, has come into focus. Here, we report measurements of the material-limited Q factors in several photonic material platforms. High-Q microresonators are fabricated from thin films of SiO2, Si3N4, Al0.2Ga0.8As, and Ta2O5. By using cavity-enhanced photothermal spectroscopy, the material-limited Q is determined. The method simultaneously measures the Kerr nonlinearity in each material and reveals how material nonlinearity and ultimate Q vary in a complementary fashion across photonic materials. Besides guiding microresonator design and material development in four material platforms, the results help establish performance limits in future photonic integrated systems.

High-performance lasers for fully integrated silicon nitride photonics.

Silicon nitride (SiN) waveguides with ultra-low optical loss enable integrated photonic applications including low noise, narrow linewidth lasers, chip-scale nonlinear photonics, and microwave photonics. Lasers are key components to SiN photonic integrated circuits (PICs), but are difficult to fully integrate with low-index SiN waveguides due to their large mismatch with the high-index III-V gain materials. The recent demonstration of multilayer heterogeneous integration provides a practical solution and enabled the first-generation of lasers fully integrated with SiN waveguides. However, a laser with high device yield and high output power at telecommunication wavelengths, where photonics applications are clustered, is still missing, hindered by large mode transition loss, non-optimized cavity design, and a complicated fabrication process. Here, we report high-performance lasers on SiN with tens of milliwatts output power through the SiN waveguide and sub-kHz fundamental linewidth, addressing all the aforementioned issues. We also show Hertz-level fundamental linewidth lasers are achievable with the developed integration techniques. These lasers, together with high-Q SiN resonators, mark a milestone towards a fully integrated low-noise silicon nitride photonics platform. This laser should find potential applications in LIDAR, microwave photonics and coherent optical communications.

Architecture for microcomb-based GHz-mid-infrared dual-comb spectroscopy.

Dual-comb spectroscopy (DCS) offers high sensitivity and wide spectral coverage without the need for bulky spectrometers or mechanical moving parts. And DCS in the mid-infrared (mid-IR) is of keen interest because of inherently strong molecular spectroscopic signatures in these bands. We report GHz-resolution mid-IR DCS of methane and ethane that is derived from counter-propagating (CP) soliton microcombs in combination with interleaved difference frequency generation. Because all four combs required to generate the two mid-IR combs rely upon stability derived from a single high-Q microcavity, the system architecture is both simplified and does not require external frequency locking. Methane and ethane spectra are measured over intervals as short as 0.5 ms, a time scale that can be further reduced using a different CP soliton arrangement. Also, tuning of spectral resolution on demand is demonstrated. Although at an early phase of development, the results are a step towards mid-IR gas sensors with chip-based architectures for chemical threat detection, breath analysis, combustion studies, and outdoor observation of trace gases.

Reaching fiber-laser coherence in integrated photonics.

We self-injection-lock a diode laser to a 1.41 m long, ultra-high Q integrated resonator. The hybrid integrated laser reaches a frequency noise floor of 0.006Hz2/Hz at 4 MHz offset, corresponding to a Lorentzian linewidth below 40 mHz-a record among semiconductor lasers. It also exhibits exceptional stability at low-offset frequencies, with frequency noise of 200Hz2/Hz at 100 Hz offset. Such performance, realized in a system comprised entirely of integrated photonic chips, marks a milestone in the development of integrated photonics; and, for the first time, to the best of our knowledge, exceeds the frequency noise performance of commercially available, high-performance fiber lasers.

Directly pumped 10 GHz microcomb modules from low-power diode lasers.

Soliton microcombs offer the prospect of advanced optical metrology and timing systems in compact form factors. In these applications, the pumping of microcombs directly from a semiconductor laser without amplification or triggering components is desirable to reduce system power and to simplify system design. At the same time, low-repetition-rate microcombs are required in many comb applications as an interface to detectors and electronics, but their increased mode volume makes them challenging to pump at low power. Here 10 GHz repetition rate soliton microcombs are directly pumped by low-power (<20 mW) diode lasers. High-Q silica microresonators are used for this low-power operation and are packaged into fiber-connectorized modules that feature temperature control for improved long-term frequency stability.

Soliton microcomb range measurement.

Laser-based range measurement systems are important in many application areas, including autonomous vehicles, robotics, manufacturing, formation flying of satellites, and basic science. Coherent laser ranging systems using dual-frequency combs provide an unprecedented combination of long range, high precision, and fast update rate. We report dual-comb distance measurement using chip-based soliton microcombs. A single pump laser was used to generate dual-frequency combs within a single microresonator as counterpropagating solitons. We demonstrated time-of-flight measurement with 200-nanometer precision at an averaging time of 500 milliseconds within a range ambiguity of 16 millimeters. Measurements at distances up to 25 meters with much lower precision were also performed. Our chip-based source is an important step toward miniature dual-comb laser ranging systems that are suitable for photonic integration.

Phonon-Limited-Linewidth of Brillouin Lasers at Cryogenic Temperatures.

Laser linewidth is of central importance in spectroscopy, frequency metrology, and all applications of lasers requiring high coherence. It is also of fundamental importance, because the Schawlow-Townes laser linewidth limit is of quantum origin. Recently, a theory of stimulated Brillouin laser (SBL) linewidth has been reported. While the SBL linewidth formula exhibits power and optical Q factor dependences that are identical to the Schawlow-Townes formula, a source of noise not present in conventional lasers, phonon occupancy of the Brillouin mechanical mode is predicted to be the dominant SBL linewidth contribution. Moreover, the quantum limit of the SBL linewidth is predicted to be twice the Schawlow-Townes limit on account of phonon participation. To help confirm this theory the SBL fundamental linewidth is measured at cryogenic temperatures in a silica microresonator. Its temperature dependence and the SBL linewidth theory are combined to predict the number of thermomechanical quanta at three temperatures. The result agrees with the Bose-Einstein phonon occupancy of the microwave-rate Brillouin mode in support of the SBL linewidth theory prediction.

Fiber taper characterization by optical backscattering reflectometry.

Fiber tapers provide a way to rapidly measure the spectra of many types of optical microcavities. Proper fabrication of the taper ensures that its width varies sufficiently slowly (adiabatically) along the length of the taper so as to maintain single spatial mode propagation. This is usually accomplished by monitoring the spectral transmission through the taper. In addition to this characterization method it is also helpful to know the taper width versus length. By developing a model of optical backscattering within the fiber taper, it is possible to use backscatter measurements to characterize the taper width versus length. The model uses the concept of a local taper numerical aperture to accurately account for varying backscatter collection along the length of the taper. In addition to taper profile information, the backscatter reflectometry method delineates locations along the taper where fluctuations in fiber core refractive index, cladding refractive index, and taper surface roughness each provide the dominant source of backscattering. Rayleigh backscattering coefficients are also extracted by fitting the data with the model and are consistent with the fiber manufacturer's datasheet. The optical backscattering reflectometer is also used to observe defects resulting from microcracks and surface contamination. All of this information can be obtained before the taper is removed from its fabrication apparatus. The backscattering method should also be prove useful for characterization of nanofibers.

Coherent ultra-violet to near-infrared generation in silica ridge waveguides.

Short duration, intense pulses of light can experience dramatic spectral broadening when propagating through lengths of optical fibre. This continuum generation process is caused by a combination of nonlinear optical effects including the formation of dispersive waves. Optical analogues of Cherenkov radiation, these waves allow a pulse to radiate power into a distant spectral region. In this work, efficient and coherent dispersive wave generation of visible to ultraviolet light is demonstrated in silica waveguides on a silicon chip. Unlike fibre broadeners, the arrays provide a wide range of emission wavelength choices on a single, compact chip. This new capability is used to simplify offset frequency measurements of a mode-locked frequency comb. The arrays can also enable mode-locked lasers to attain unprecedented tunable spectral reach for spectroscopy, bioimaging, tomography and metrology.

Microresonator soliton dual-comb spectroscopy.

Measurement of optical and vibrational spectra with high resolution provides a way to identify chemical species in cluttered environments and is of general importance in many fields. Dual-comb spectroscopy has emerged as a powerful approach for acquiring nearly instantaneous Raman and optical spectra with unprecedented resolution. Spectra are generated directly in the electrical domain, without the need for bulky mechanical spectrometers. We demonstrate a miniature soliton-based dual-comb system that can potentially transfer the approach to a chip platform. These devices achieve high-coherence pulsed mode locking. They also feature broad, reproducible spectral envelopes, an essential feature for dual-comb spectroscopy. Our work shows the potential for integrated spectroscopy with high signal-to-noise ratios and fast acquisition rates.

Pump frequency noise coupling into a microcavity by thermo-optic locking.

As thermo-optic locking is widely used to establish a stable frequency detuning between an external laser and a high Q microcavity, it is important to understand how this method affects microcavity temperature and frequency fluctuations. A theoretical analysis of the laser-microcavity frequency fluctuations is presented and used to find the spectral dependence of the suppression of laser-microcavity, relative frequency noise caused by thermo-optic locking. The response function is that of a high-pass filter with a bandwidth and low-frequency suppression that increase with input power. The results are verified using an external-cavity diode laser and a silica disk resonator. The locking of relative frequency fluctuations causes temperature fluctuations within the microcavity that transfer pump frequency noise onto the microcavity modes over the thermal locking bandwidth. This transfer is verified experimentally. These results are important to investigations of noise properties in many nonlinear microcavity experiments in which low-frequency, optical-pump frequency noise must be considered.

Electro-optical frequency division and stable microwave synthesis.

Optical frequency division by using frequency combs has revolutionized time keeping and the generation of stable microwave signals. We demonstrate optical frequency division and microwave generation by using a tunable electrical oscillator to create dual combs through phase modulation of two optical signals that have a stable difference frequency. Phase-locked control of the electrical oscillator by means of optical frequency division produces stable microwaves. Our approach transposes the oscillator and frequency reference of a conventional microwave frequency synthesizer. In this way, the oscillator experiences large phase noise reduction relative to the frequency reference. The electro-optical approach additionally relaxes the need for highly linear photodetection of the comb mode spacing. As well as simplicity, the technique is also tunable and scalable to higher division ratios.

Design and characterization of whispering-gallery spiral waveguides.

Whispering gallery delay lines have demonstrated record propagation length on a silicon chip and can provide a way to transfer certain applications of optical fiber to wafer-based systems. Their design and fabrication requires careful control of waveguide curvature and etching conditions to minimize connection losses between elements of the delay line. Moreover, loss characterization based on optical backscatter requires normalization to account for the impact of curvature on backscatter rate. In this paper we provide details on design of Archimedean whispering-gallery spiral waveguides, their coupling into cascaded structures, as well as optical loss characterization by optical backscatter reflectometry.