Four-Channel Ultrasonic Sensor for Bulk Liquid and Biochemical Surface Interrogation.

Custom electronics tailored for ultrasonic applications with four ultrasonic transmit-receive channels and a nominal 25 MHz single channel frequency were developed for ultrasound BAW and SAW biosensor uses. The designed integrated microcontroller, supported by Python with a SciPy library, and the developed system measured the time of flight (TOF) and other wave properties to characterize the acoustic properties of a bulk of the liquid in a microchannel or acoustic properties of biological species attached to an analytic surface in real time. The system can utilize both piezoelectric and capacitive micromachined ultrasound transducers. The device demonstrated a linear response to changes in water salinity. This response was primarily attributed to the time-of-flight (TOF) changes related to the varying solution density. Furthermore, real-time DNA oligonucleotide-based interactions between oligonucleotides immobilized on the device's analytical area and oligonucleotides attached to gold nanoparticles (Au NPs) in the solution were demonstrated. The biological interaction led to an exponential decrease in the acoustic interfacial wave propagating across the interface between the solution and the solid surface of the sensor, the TOF signal. This decrease was attributed to the increase in the effective density of the solution in the vicinity of the sensor's analytical area, as Au NPs modified by oligonucleotides were binding to the analytical area. The utilization of Au NPs in oligonucleotide surface binding yields a considerably stronger sensor signal than previously observed in earlier CMUT-based TOF biosensor prototypes.

Design of Zeolitic Imidazolate Framework-8-Functionalized Capacitive Micromachined Ultrasound Transducer Gravimetric Sensors for Gas and Hydrocarbon Vapor Detection.

A capacitive micromachined ultrasound transducer (CMUT) was engineered and functionalized with zeolitic imidazolate framework-8 (ZIF-8) dispersed in a photoresist AZ1512HS (AZ) matrix to function as a gravimetric gas sensor. The sensor response was recorded in the presence of nitrogen, argon, carbon dioxide, and methane gases as well as water, acetylene, a propane/butane mixture, n-hexane, gasoline, and diesel vapors. The photoresist matrix alone was found to have a negligible response to all the gases and vapors, except for water vapor. No visible difference in sensor response was detected when switching from nitrogen to methane gas. However, a strong shift in the sensor resonance frequency was observed when exposed to higher hydrocarbons, ranging from 1 kHz for acetylene to 7.5 kHz for gasoline. Even longer-chain hydrocarbons, specifically kerosene and more so diesel, had a significantly reduced sensor frequency shift compared with gasoline. Sensors functionalized with a thin film of AZ+ZIF-8 demonstrated higher sensitivity in their response to a hydrocarbon molecular mass than without functionalization.

Characteristics and Functionality of Cantilevers and Scanners in Atomic Force Microscopy.

In this paper, we provide a systematic review of atomic force microscopy (AFM), a fast-developing technique that embraces scanners, controllers, and cantilevers. The main objectives of this review are to analyze the available technical solutions of AFM, including the limitations and problems. The main questions the review addresses are the problems of working in contact, noncontact, and tapping AFM modes. We do not include applications of AFM but rather the design of different parts and operation modes. Since the main part of AFM is the cantilever, we focused on its operation and design. Information from scientific articles published over the last 5 years is provided. Many articles in this period disclose minor amendments in the mechanical system but suggest innovative AFM control and imaging algorithms. Some of them are based on artificial intelligence. During operation, control of cantilever dynamic characteristics can be achieved by magnetic field, electrostatic, or aerodynamic forces.

Acoustic Streaming Efficiency in a Microfluidic Biosensor with an Integrated CMUT.

The effect of microchannel height on acoustic streaming velocity and capacitive micromachined ultrasound transducer (CMUT) cell damping was investigated. Microchannels with heights ranging from 0.15 to 1.75 mm were used in experiments, and computational microchannel models with heights varying from 10 to 1800 micrometers were simulated. Both simulated and measured data show local minima and maxima of acoustic streaming efficiency associated with the wavelength of the `bulk acoustic wave excited at 5 MHz frequency. Local minima occur at microchannel heights that are multiples of half the wavelength (150 µm), which are caused by destructive interference between excited and reflected acoustic waves. Therefore, microchannel heights that are not multiples of 150 µm are more favorable for higher acoustic streaming effectiveness since destructive interference decreases the acoustic streaming effectiveness by more than 4 times. On average, the experimental data show slightly higher velocities for smaller microchannels than the simulated data, but the overall observation of higher streaming velocities in larger microchannels is not altered. In additional simulation, at small microchannel heights (10-350 µm), local minima at microchannel heights that are multiples of 150 µm were observed, indicating the interference between excited and reflected waves and causing acoustic damping of comparatively compliant CMUT membranes. Increasing the microchannel height to over 100 µm tends to eliminate the acoustic damping effect as the local minima of the CMUT membrane swing amplitude approach the maximum value of 42 nm, which is the calculated amplitude of the freely swinging membrane under the described conditions. At optimum conditions, an acoustic streaming velocity of over 2 mm/s in a 1.8 mm-high microchannel was achieved.

Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications.

The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references.

Deep Q-Learning in Robotics: Improvement of Accuracy and Repeatability.

Recent industrial robotics covers a broad part of the manufacturing spectrum and other human everyday life applications; the performance of these devices has become increasingly important. Positioning accuracy and repeatability, as well as operating speed, are essential in any industrial robotics application. Robot positioning errors are complex due to the extensive combination of their sources and cannot be compensated for using conventional methods. Some robot positioning errors can be compensated for only using machine learning (ML) procedures. Reinforced machine learning increases the robot's positioning accuracy and expands its implementation capabilities. The provided methodology presents an easy and focused approach for industrial in situ robot position adjustment in real-time during production setup or readjustment cases. The scientific value of this approach is a methodology using an ML procedure without huge external datasets for the procedure and extensive computing facilities. This paper presents a deep q-learning algorithm applied to improve the positioning accuracy of an articulated KUKA youBot robot during operation. A significant improvement of the positioning accuracy was achieved approximately after 260 iterations in the online mode and initial simulation of the ML procedure.

Inkjet-Printed Functionalization of CMUT-Based CO2 Sensors.

The trade-off between the functionalization shift of the informative parameters and sensitivity of capacitive micromachined ultrasound transducers (CMUT)-based CO2 sensors is addressed, and the CMUT surface modification process by thin inkjet-printed polyethyleneimine (PEI) films is optimized. It was shown that by the proper preparation of the active CMUT surface and properly diluted PEI solution, it is possible to minimize the functionalization shift of the resonance frequency and the quality of the resonance and preserve the sensitivity potential. So, after optimization, we demonstrated 23.2 kHz frequency shift readings of the sensor with 16 MHz nominal frequency while in the gas chamber and switching between pure N2 and CO2. After testing the sensors with different PEI film thickness, it was confirmed that a 200 nm average thickness of a PEI film is an optimum, because this is the practical limit of CO2 absorption depth at given conditions. Additionally, we note that modification of the hydrophilic/hydrophobic properties of the CMUT surface allows changing the nanoscale surface roughness of the printed PEI film and controlling the area resolution of the inkjet functionalization by reducing the diameter of a single dot down to 150 µm by a commercially available printer cartridge.

An Automotive Ferrofluidic Electromagnetic System for Energy Harvesting and Adaptive Damping.

Vibration energy harvesting is receiving significant interest due to the possibility of using extra power in various machines and constructions. This paper presents an energy-harvesting system that has a structure similar to that of a linear generator but uses permanent magnets and magnetorheological fluid insets. The application of a standard vehicle example with low frequencies and amplitudes of the excitations was used for the optimization and experimental runs. The optimization for low excitation amplitudes shows that the best magnetic field change along the slider is obtained using differentially orientated radial magnets of 5 mm in width. This configuration was used for the experimental research, resulting in 1.2-3.28 W of power generated in the coils. The power conditioning system in the experimental research was replaced by loading resistors. Nevertheless, the initial idea of energy harvesting and a damping effect was confirmed by the circuit voltage output.

Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure-A Review.

This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element modeling. Additionally, the most common fabrication techniques, including sacrificial release and wafer bonding, are discussed for advantages for gravimetric sensing. As functional materials are the most important part of the selective gravimetric sensing, the review of different functional material properties and coating and application methods is necessary. Particularly, absorption and desorption mechanisms of functional materials, like methylated polyethyleneimine, with examples of applications for gas sensing and using immune complexes for specific biomolecules detection are reviewed.

CMUT-based biosensor with convolutional neural network signal processing.

The improvement of the micromachined ultrasound transducer based (CMUT) biosensor fabrication technology and signal processing, which led to higher signal to noise ratio is reported. The biosensor contains interdigitally arranged CMUT structure with gold-coated analytical area. It is assembled with the plexiglass microchannels. CMUTs were fabricated with the wafer bonding technology for 5 MHz operation in immersion. For signal processing the convolutional neural network (CNN) was developed and trained to classify the sensor data to different propagation delay values. For training of the network 750 thousand signals representing different properties of the bioanalyte and different noise conditions was simulated by the finite time difference domain (FDTD) model. The capability of the CNN algorithm to classify the propagation delay data was compared with the adaptive passband filter signal processing algorithm used in our previous version of the senor. Both sensing channels were run simultaneously with the reference liquids in the microchannel: deionized water switching to 0.9% saline. It was found that CNN channel is capable to improve the signal to noise ratio for this experiment to 75 dB, when the same property for the passband filter channel was only 60 dB. This led to the generalization about the advantage of CNN channel to provide 15 dB less of instrumental noise. Finally, the real-time detection ability of the bovine serum albumin (BSA) deposition on the analytical area of improved sensor was demonstrated.

Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures.

A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO2) and sulfur dioxide (SO2) mixtures in nitrogen. The created measurement setup of continuous data collection, integrated with an in-situ Fourier Transform Infrared (FT-IR) spectroscopy, allows for better understanding of the mechanisms and molecular interactions with the sensing layer (methylated poly(ethylene)imine) and its need of surface functionalization for multiple gas detection. During experimentation with CO2 gases, weak molecular interactions were observed in spectroscopy data. Linear sensor response to frequency shift was observed with CO2 concentrations ranging from 0.16 vol % to 1 vol %. Moreover, the Raman and FT-IR spectroscopy data showed much stronger SO2 and the polymer interactions, molecules were bound by stronger forces and irreversibly changed the polymer film properties. However, the sensor change in resonance frequency in the tested region of 1 vol % to 5 vol % SO2 showed a linear response. This effect changed not only the device resonance frequency but also affected the magnitude of electroacoustic impedance which was used for differentiating the gas mixture of CO2, SO2, in dry N2.

Modification of the AFM Sensor by a Precisely Regulated Air Stream to Increase Imaging Speed and Accuracy in the Contact Mode.

Increasing the imaging rate of atomic force microscopy (AFM) without impairing of the imaging quality is a challenging task, since the increase in the scanning speed leads to a number of artifacts related to the limited mechanical bandwidth of the AFM components. One of these artifacts is the loss of contact between the probe tip and the sample. We propose to apply an additional nonlinear force on the upper surface of a cantilever, which will help to keep the tip and surface in contact. In practice, this force can be produced by the precisely regulated airflow. Such an improvement affects the AFM system dynamics, which were evaluated using a mathematical model that is presented in this paper. The model defines the relationships between the additional nonlinear force, the pressure of the applied air stream, and the initial air gap between the upper surface of the cantilever and the end of the air duct. It was found that the nonlinear force created by the stream of compressed air (aerodynamic force) prevents the contact loss caused by the high scanning speed or the higher surface roughness, thus maintaining stable contact between the probe and the surface. This improvement allows us to effectively increase the scanning speed by at least 10 times using a soft (spring constant of 0.2 N/m) cantilever by applying the air pressure of 40 Pa. If a stiff cantilever (spring constant of 40 N/m) is used, the potential of vertical deviation improvement is twice is large. This method is suitable for use with different types of AFM sensors and it can be implemented practically without essential changes in AFM sensor design.

Air Quality Effects on Human Health and Approaches for Its Assessment through Microfluidic Chips.

Air quality depends on the various gases and particles present in it. Both natural phenomena and human activities affect the cleanliness of air. In the last decade, many countries experienced an unprecedented industrial growth, resulting in changing air quality values, and correspondingly, affecting our life quality. Air quality can be accessed by employing microchips that qualitatively and quantitatively determine the present gases and dust particles. The so-called particular matter 2.5 (PM2.5) values are of high importance, as such small particles can penetrate the human lung barrier and enter the blood system. There are cancer cases related to many air pollutants, and especially to PM2.5, contributing to exploding costs within the healthcare system. We focus on various current and potential future air pollutants, and propose solutions on how to protect our health against such dangerous substances. Recent developments in the Organ-on-Chip (OoC) technology can be used to study air pollution as well. OoC allows determination of pollutant toxicity and speeds up the development of novel pharmaceutical drugs.

Greenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer.

We manufactured and tested a capacitive micromachined ultrasound transducer (CMUT)-based sensor for CO2 detection at environmentally relevant concentrations using polyethylenimine as a CO2 binding material. The assembly of a sensing chip was 10 × 20 mm, and up to 5 gases can potentially be detected simultaneously using a masking technique and different sensing materials. The limit of detection was calculated to be 0.033 CO2 vol % while the limit of quantification was calculated to be 0.102%. The sensor exhibited a linear response between 0.06% and 0.30% CO2 while concentrations close to those in flue gas can also be measured using dilution with inert gas.

Capacitive micromachined ultrasound transducer (cMUT) for immunosensor design.

An affinity sensor based on a capacitive micromachined ultrasound transducer (cMUT) is reported by this Communication. The cMUT micromembrane arrays modified with adsorbed bovine leukemia virus protein gp51 were applied as a biological recognition part. The cMUT-based sensor is shown to be sensitive to the antibodies against bovine leukemia virus protein gp51 (anti-gp51). Two different concentrations of anti-gp51-containing samples and one blank sample without anti-gp51 were tested. The sensitivity of cMUT-based immunosensor is comparable with the sensitivity of a quartz microbalance-based immunosensor. The cMUT array provides a multi-channel system for the measurement of analytical signal. Moreover, two different characteristics--the resonance frequency shift (Deltaf) and the shift of the real part of the electromechanical impedance (DeltaRe)--could have been evaluated simultaneously. Both analytical signals are informative and can be applied for the estimation of immune complex formation. We found the performance of such a system being potentially superior over some other immunosensing techniques. It is more rapid than electrochemical techniques and provides two different informative parameters.