RESUMO
The strong light localization and long photon lifetimes in whispering gallery mode (WGM) microresonators, benefiting from a high-quality (Q) factor and a small mode volume (V), could significantly enhance light-matter interactions, enabling efficient nonlinear photon generation and paving the way for exploring novel on-chip optical functionalities. However, the leakage of energy from bending losses severely limits the improvement of the Q factor for subwavelength WGM microresonators. Here, we demonstrated an integrated self-suspended WGM microresonator that combines external rings and bridges with a microdisk on a platform of silicon on insulator, achieving about one-hundred-fold enhancement in the Q factor and an ultrasmall mode volume of 2.67(/λnSi)3 as predicted by numerical simulations. We experimentally confirmed the improved performance of the subwavelength WGM resonator with the dramatic enhancement of third-harmonic generation and second-harmonic generation on this device. Our work is anticipated to enhance light-matter interactions on small-footprint microresonators and boost the development of efficient integrated nonlinear and quantum photonics.