RESUMO
Microelectrode arrays (MEA) are widely used for bioelectronic monitoring of alterations in cells and tissues. MEAs are based on a substrate that is structured with electrodes and conducting paths. While cheap substrates like printed circuit board materials offers easy production and flexible contacting, there are limitations regarding microstructure resolution, optical transparency and biocompatibility. In contrast, glass substrates are favored due to its biocompatibility, chemical resistance and optical transparency. Drawbacks are high substrate costs and limited flexibility for routing of conducting paths. To overcome these limitations, we wanted to use optical transparent polymer-based substrates. Therefore, we identified the polymer poly-methyl-methacrylate (PMMA) as a promising substrate material, due to its good optical and mechanical properties as well as biocompatibility. To achieve sufficient chemical resistance for high resolution photolithographic structuring a novel process had to be developed involving a protection coating. After optimization of the structuring process, we achieved a comparable resolution and thus, microelectrodes with diameter of less than 100 µm. Moreover, the use of PMMA allowed the simple integration of more than 400 vias directly into the substrate for contacting of the microelectrode array from the bottom without the need of complex and error prone redirecting adapters with hundreds of additional bonding sides. In order to show that the PMMA based MEA is comparable to glass based MEA in terms of signal quality and sensitivity as well as optical and surface properties, we cultivated different cell models on the MEAs and validated our 96-well PMMA MEAs by different bioelectronic monitoring techniques.