Abnormal heating of low-energy electrons in low-pressure capacitively coupled discharges.

Park, G Y; You, S J; Iza, F; Lee, J K.

Affiliation

Park GY; Department of Electronics and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, Republic of Korea.

Phys Rev Lett ; 98(8): 085003, 2007 Feb 23.

Article in En | MEDLINE | ID: mdl-17359106

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Collection: 01-internacional Database: MEDLINE Language: En Journal: Phys Rev Lett Year: 2007 Document type: Article

Collection: 01-internacional Database: MEDLINE Language: En Journal: Phys Rev Lett Year: 2007 Document type: Article