Grating metrology for X-ray and V-UV synchrotron beamlines at SOLEIL.
Rev Sci Instrum
; 90(2): 021714, 2019 Feb.
Article
in En
| MEDLINE
| ID: mdl-30831694
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Rev Sci Instrum
Year:
2019
Document type:
Article