GeTe-Based Alloy Films Prepared by a Room Temperature Solution Process.

ABSTRACT

This article describes the preparation of GeTe-based alloy films using a solution-based technique. The dissolution behavior of GeTe was initially examined by comparing the weight loss of GeTe powder in different solvents, and it was found that, unlike in the cases of n-butylamine and NH4OH, KOH fully dissolved GeTe to form an agglomerate-free solution. X-ray diffraction analysis revealed that the reaction between GeTe and KOH resulted in the formation of rhombohedral GeTe, cubic GeTe4, and hexagonal Te structures after drying. GeTe-based alloy films were then prepared by the spin coating of the GeTe-containing solutions on a silicon substrate. The surface morphology and reflectance properties of the prepared films were found to be highly dependent on the spin speed, with optimization of the spin coating parameter resulting in the deposition of a continuous and smooth film.