Design and performance of a high-resolution photoelectron microscope.
Ultramicroscopy
; 36(1-3): 196-221, 1991 May.
Article
em En
| MEDLINE
| ID: mdl-1882484
ABSTRACT
The design of a high-resolution photoelectron microscope (photoelectron emission microscope) is described. It is an oil-free ultrahigh-vacuum instrument utilizing electrostatic electron optics. New designs are presented for a specimen translator, cathode stage, aperture stop control, electrostatic hexapole stigmator, beam shutter, and camera system. These components could also be used in a low-energy electron microscope (LEEM). The theoretical resolution of this instrument is 5 nm for UV illumination near the photoemission threshold. The photoelectron microscope is now in operation at the University of Oregon, and it is achieving results within a factor of two of this design limit.
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01-internacional
Base de dados:
MEDLINE
Assunto principal:
Microscopia Eletrônica
Idioma:
En
Revista:
Ultramicroscopy
Ano de publicação:
1991
Tipo de documento:
Article