Development of a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using nanoparticle solutions.

Vervaele, Mattias; De Roo, Bert; Deschaume, Olivier; Rajala, Markku; Guillon, Herve; Sousa, Marilyne; Bartic, Carmen; Van Haesendonck, Chris; Seo, Jin Won; Locquet, Jean-Pierre

Vervaele, Mattias; De Roo, Bert; Deschaume, Olivier; Rajala, Markku; Guillon, Herve; Sousa, Marilyne; Bartic, Carmen; Van Haesendonck, Chris; Seo, Jin Won; Locquet, Jean-Pierre.

Afiliação

Vervaele M; Department of Physics and Astronomy, KU Leuven, BE-3001 Leuven, Belgium.
De Roo B; Department of Physics and Astronomy, KU Leuven, BE-3001 Leuven, Belgium.
Deschaume O; Department of Physics and Astronomy, KU Leuven, BE-3001 Leuven, Belgium.
Rajala M; DCA Instruments, 20360 Turku, Finland.
Guillon H; Kemstream, 34055 Montpellier, France.
Sousa M; IBM Research, 8803 Rüschlikon, Switzerland.
Bartic C; Department of Physics and Astronomy, KU Leuven, BE-3001 Leuven, Belgium.
Van Haesendonck C; Department of Physics and Astronomy, KU Leuven, BE-3001 Leuven, Belgium.
Seo JW; Department of Materials Engineering, KU Leuven, BE-3001 Leuven, Belgium.
Locquet JP; Department of Physics and Astronomy, KU Leuven, BE-3001 Leuven, Belgium.

Rev Sci Instrum ; 87(2): 025101, 2016 Feb.

Article em En | MEDLINE | ID: mdl-26931885

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Rev Sci Instrum Ano de publicação: 2016 Tipo de documento: Article

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Rev Sci Instrum Ano de publicação: 2016 Tipo de documento: Article