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Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials.
Liu, Na; Wang, Feifei; Liu, Lianqing; Yu, Haibo; Xie, Shaorong; Wang, Jun; Wang, Yuechao; Lee, Gwo-Bin; Li, Wen J.
Afiliação
  • Liu N; State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.
  • Wang F; School of Mechatronics Engineering and Automation, Shanghai University, Shanghai 200072, China.
  • Liu L; State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.
  • Yu H; University of Chinese Academy of Sciences, Beijing, 100049, China.
  • Xie S; State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.
  • Wang J; State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.
  • Wang Y; School of Mechatronics Engineering and Automation, Shanghai University, Shanghai 200072, China.
  • Lee GB; Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
  • Li WJ; State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.
Sci Rep ; 6: 32106, 2016 08 26.
Article em En | MEDLINE | ID: mdl-27561917
ABSTRACT
The synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method.

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sci Rep Ano de publicação: 2016 Tipo de documento: Article

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sci Rep Ano de publicação: 2016 Tipo de documento: Article