Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition.

Dendooven, Jolien; Solano, Eduardo; Minjauw, Matthias M; Van de Kerckhove, Kevin; Coati, Alessandro; Fonda, Emiliano; Portale, Giuseppe; Garreau, Yves; Detavernier, Christophe

Dendooven, Jolien; Solano, Eduardo; Minjauw, Matthias M; Van de Kerckhove, Kevin; Coati, Alessandro; Fonda, Emiliano; Portale, Giuseppe; Garreau, Yves; Detavernier, Christophe.

Afiliação

Dendooven J; Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.
Solano E; Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.
Minjauw MM; Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.
Van de Kerckhove K; Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.
Coati A; Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP48, 91192 Gif-sur-Yvette, France.
Fonda E; Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP48, 91192 Gif-sur-Yvette, France.
Portale G; DUBBLE Beamline BM26, ESRF European Synchrotron, Avenue des Martyrs, CS40220, 38043 Grenoble, France.
Garreau Y; Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP48, 91192 Gif-sur-Yvette, France.
Detavernier C; Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium.

Rev Sci Instrum ; 87(11): 113905, 2016 Nov.

Article em En | MEDLINE | ID: mdl-27910568

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Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Rev Sci Instrum Ano de publicação: 2016 Tipo de documento: Article

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Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Rev Sci Instrum Ano de publicação: 2016 Tipo de documento: Article