Investigation of growth parameters influence on self-catalyzed ITO nanowires by high RF-power sputtering.
Nanotechnology
; 2018 Feb 15.
Article
em En
| MEDLINE
| ID: mdl-29446762
ABSTRACT
ITO nanowires have been successfully fabricated using a radio-frequency sputtering technique with a high RF-power of 250W. The fabrication of the ITO nanowires has been optimized through the study of oxygen flow rates, temperatures and RF-power. The difference in the morphology of the ITO nanowires prepared by using a new target and a used target has been first observed and the mechanism for the difference has been discussed in detail. A hollow structure and air voids within the nanowires are formed during the process of the nanowire growth. The ITO nanowires fabricated by this method has demonstrated good conductivity (15Ω/sq) and a transmittance of more than 64% at a wavelength longer than 550nm after annealing. Furthermore, detailed microstructure studies show that the ITO nanowires exhibit a large number of oxygen vacancies. As a result, it is expected that they can be useful for the fabrication of gas sensor devices.
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01-internacional
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MEDLINE
Idioma:
En
Revista:
Nanotechnology
Ano de publicação:
2018
Tipo de documento:
Article