Improving the imaging capability of an on-axis transmission Kikuchi detector.

ABSTRACT

Transmission Kikuchi Diffraction (TKD) in the scanning electron microscope has been developing at a fast pace since its introduction less than a decade ago. The recently presented on-axis detector configuration, with its optimized geometry, has significantly increased the signal yield and facilitated the acquisition of STEM images in bright field (BF) and dark field (DF) mode, in addition to the automated orientation mapping of nanocrystalline electron transparent samples. However, the physical position of the integrated imaging system, located outside the detector screen, requires its movement in order to combine high resolution STEM images with high resolution orientation measurements. The difference between the two positions makes it impossible to acquire optimal signals simultaneously, leading to challenges when investigating site-specific nanocrystalline microstructures. To eliminate this drawback, a new imaging capability was added at the centre of the on-axis TKD detector, thus enabling acquisition of optimal quality BF images and orientation maps without detector movement. The advantages brought about by this new configuration are presented and the associated limitations are discussed.