Your browser doesn't support javascript.
loading
In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection.
Setiono, Andi; Bertke, Maik; Nyang'au, Wilson Ombati; Xu, Jiushuai; Fahrbach, Michael; Kirsch, Ina; Uhde, Erik; Deutschinger, Alexander; Fantner, Ernest J; Schwalb, Christian H; Wasisto, Hutomo Suryo; Peiner, Erwin.
Afiliação
  • Setiono A; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
  • Bertke M; Research Center for Physics, Indonesian Institute of Sciences (LIPI), 15314 Tangerang Selatan, Indonesia.
  • Nyang'au WO; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
  • Xu J; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
  • Fahrbach M; Department of Metrology, Kenya Bureau of Standards (KEBS), 00200 Nairobi, Kenya.
  • Kirsch I; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
  • Uhde E; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
  • Deutschinger A; Fraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, Germany.
  • Fantner EJ; Fraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, Germany.
  • Schwalb CH; SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria.
  • Wasisto HS; SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria.
  • Peiner E; GETec Microscopy GmbH, 1220 Vienna, Austria.
Sensors (Basel) ; 20(3)2020 Jan 22.
Article em En | MEDLINE | ID: mdl-31979161
Palavras-chave
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies Idioma: En Revista: Sensors (Basel) Ano de publicação: 2020 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies Idioma: En Revista: Sensors (Basel) Ano de publicação: 2020 Tipo de documento: Article