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From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications.
Mai, Lukas; Mitschker, Felix; Bock, Claudia; Niesen, Alessia; Ciftyurek, Engin; Rogalla, Detlef; Mickler, Johannes; Erig, Matthias; Li, Zheshen; Awakowicz, Peter; Schierbaum, Klaus; Devi, Anjana.
Afiliação
  • Mai L; Inorganic Materials Chemistry, Ruhr University Bochum, Universitätsstr. 150, Bochum, 44801, Germany.
  • Mitschker F; Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum, Universitätsstr. 150, Bochum, 44801, Germany.
  • Bock C; Microsystems Technology, Ruhr University Bochum, Universitätsstr. 150, Bochum, 44801, Germany.
  • Niesen A; Forschung und Entwicklung, GB Sensorik, paragon GmbH & Co KGaA, Schwalbenweg 29, Delbrück, 33129, Germany.
  • Ciftyurek E; Department of Material Science Institute of Experimental Condensed Matter Physics, Heinrich Heine University Düsseldorf, Universitätsstr. 1, Düsseldorf, 40225, Germany.
  • Rogalla D; RUBION, Ruhr University Bochum, Universitätsstr. 150, Bochum, 44801, Germany.
  • Mickler J; Forschung und Entwicklung, GB Sensorik, paragon GmbH & Co KGaA, Schwalbenweg 29, Delbrück, 33129, Germany.
  • Erig M; Forschung und Entwicklung, GB Sensorik, paragon GmbH & Co KGaA, Schwalbenweg 29, Delbrück, 33129, Germany.
  • Li Z; Department of Physics and Astronomy - Centre for Storage Ring Facilities (ISA), Aarhus University, Aarhus, 8000, Denmark.
  • Awakowicz P; Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum, Universitätsstr. 150, Bochum, 44801, Germany.
  • Schierbaum K; Department of Material Science Institute of Experimental Condensed Matter Physics, Heinrich Heine University Düsseldorf, Universitätsstr. 1, Düsseldorf, 40225, Germany.
  • Devi A; Inorganic Materials Chemistry, Ruhr University Bochum, Universitätsstr. 150, Bochum, 44801, Germany.
Small ; 16(22): e1907506, 2020 Jun.
Article em En | MEDLINE | ID: mdl-32346997
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Small Ano de publicação: 2020 Tipo de documento: Article
Texto completo
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XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Small Ano de publicação: 2020 Tipo de documento: Article