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A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference.
Qi, Yonghong; Zhao, Minghui; Li, Bo; Ren, Ziming; Li, Bing; Wei, Xueyong.
Afiliação
  • Qi Y; State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Zhao M; State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Li B; State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Ren Z; State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Li B; State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Wei X; State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Sensors (Basel) ; 22(5)2022 Mar 03.
Article em En | MEDLINE | ID: mdl-35271120
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2022 Tipo de documento: Article
Texto completo
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XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2022 Tipo de documento: Article