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High-throughput growth of HfO2 films using temperature-gradient laser chemical vapor deposition.
Tu, Rong; Liu, Ziming; Wang, Chongjie; Lu, Pengjian; Guo, Bingjian; Xu, Qingfang; Li, Bao-Wen; Zhang, Song.
Afiliação
  • Tu R; Chaozhou Branch of Chemistry and Chemical Engineering Guangdong Laboratory Chaozhou 521000 People's Republic of China.
  • Liu Z; State Key Laboratory of Advanced Technology for Materials and Processing, Wuhan University of Technology 122 Luoshi Road Wuhan 430070 People's Republic of China kobe@whut.edu.cn +86-27-87499449 +86-27-87499449.
  • Wang C; State Key Laboratory of Advanced Technology for Materials and Processing, Wuhan University of Technology 122 Luoshi Road Wuhan 430070 People's Republic of China kobe@whut.edu.cn +86-27-87499449 +86-27-87499449.
  • Lu P; State Key Laboratory of Advanced Technology for Materials and Processing, Wuhan University of Technology 122 Luoshi Road Wuhan 430070 People's Republic of China kobe@whut.edu.cn +86-27-87499449 +86-27-87499449.
  • Guo B; State Key Laboratory of Advanced Technology for Materials and Processing, Wuhan University of Technology 122 Luoshi Road Wuhan 430070 People's Republic of China kobe@whut.edu.cn +86-27-87499449 +86-27-87499449.
  • Xu Q; Wuhan Tuocai Technology Co., Ltd. 147 Luoshi Road Wuhan 430070 People's Republic of China.
  • Li BW; School of Materials Science and Engineering, Wuhan University of Technology 122 Luoshi Road Wuhan 430070 People's Republic of China.
  • Zhang S; Zhejiang MTCN Technology Co., Ltd. No. 59, Luhui Road, Taihu Street Zhejiang Province 311103 People's Republic of China.
RSC Adv ; 12(24): 15555-15563, 2022 May 17.
Article em En | MEDLINE | ID: mdl-35685177
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: RSC Adv Ano de publicação: 2022 Tipo de documento: Article
Texto completo
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XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: RSC Adv Ano de publicação: 2022 Tipo de documento: Article