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SnO deposition via water based ALD employing tin(II) formamidinate: precursor characterization and process development.
Huster, Niklas; Ghiyasi, Ramin; Zanders, David; Rogalla, Detlef; Karppinen, Maarit; Devi, Anjana.
Afiliação
  • Huster N; Inorganic Materials Chemistry, Faculty of Chemistry and Biochemistry, Ruhr-University Bochum, 44801 Bochum, Germany. anjana.devi@rub.de.
  • Ghiyasi R; Department of Chemistry and Materials Science, Aalto University, FI-00076 Espoo, Finland. maarit.karppinen@aalto.fi.
  • Zanders D; Inorganic Materials Chemistry, Faculty of Chemistry and Biochemistry, Ruhr-University Bochum, 44801 Bochum, Germany. anjana.devi@rub.de.
  • Rogalla D; RUBION, Ruhr University Bochum, 44801 Bochum, Germany.
  • Karppinen M; Department of Chemistry and Materials Science, Aalto University, FI-00076 Espoo, Finland. maarit.karppinen@aalto.fi.
  • Devi A; Inorganic Materials Chemistry, Faculty of Chemistry and Biochemistry, Ruhr-University Bochum, 44801 Bochum, Germany. anjana.devi@rub.de.
Dalton Trans ; 51(39): 14970-14979, 2022 Oct 11.
Article em En | MEDLINE | ID: mdl-36111964
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Dalton Trans Ano de publicação: 2022 Tipo de documento: Article
Texto completo
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XML
PubMed Links
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Dalton Trans Ano de publicação: 2022 Tipo de documento: Article