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3D Nanoprinting Replication Enhancement Using a Simulation-Informed Analytical Model for Electron Beam Exposure Dose Compensation.
Fowlkes, Jason D; Winkler, Robert; Rack, Philip D; Plank, Harald.
Afiliação
  • Fowlkes JD; Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee37831, United States.
  • Winkler R; Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010Graz, Austria.
  • Rack PD; Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee37996, United States.
  • Plank H; Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010Graz, Austria.
ACS Omega ; 8(3): 3148-3175, 2023 Jan 24.
Article em En | MEDLINE | ID: mdl-36713724
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: ACS Omega Ano de publicação: 2023 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: ACS Omega Ano de publicação: 2023 Tipo de documento: Article