A novel cubic-exp evaluation algorithm considering non-symmetrical axial response signals of confocal microscopes.

Hagemeier, Sebastian; Pahl, Tobias; Breidenbach, Johannes; Lehmann, Peter

Hagemeier, Sebastian; Pahl, Tobias; Breidenbach, Johannes; Lehmann, Peter.

Afiliação

Hagemeier S; Measurement Technology, Department of Electrical Engineering and Computer Science, University of Kassel, Kassel, Germany.
Pahl T; Measurement Technology, Department of Electrical Engineering and Computer Science, University of Kassel, Kassel, Germany.
Breidenbach J; Measurement Technology, Department of Electrical Engineering and Computer Science, University of Kassel, Kassel, Germany.
Lehmann P; Measurement Technology, Department of Electrical Engineering and Computer Science, University of Kassel, Kassel, Germany.

Microsc Res Tech ; 86(8): 1012-1022, 2023 Aug.

Article em En | MEDLINE | ID: mdl-37357955

Palavras-chave

asymmetrical signal; confocal microscope; evaluation algorithm; layer thickness; signal analysis

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Revista: Microsc Res Tech Ano de publicação: 2023 Tipo de documento: Article

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