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The Impact of Ambient Temperature on Electrothermal Characteristics in Stacked Nanosheet Transistors with Multiple Lateral Stacks.
Zhao, Peng; Cao, Lei; Wang, Guilei; Wu, Zhenhua; Yin, Huaxiang.
Afiliação
  • Zhao P; Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China.
  • Cao L; State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China.
  • Wang G; School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China.
  • Wu Z; Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China.
  • Yin H; State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China.
Nanomaterials (Basel) ; 13(22)2023 Nov 18.
Article em En | MEDLINE | ID: mdl-37999325

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Ano de publicação: 2023 Tipo de documento: Article

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Ano de publicação: 2023 Tipo de documento: Article