Fabrication of 100-nm-period domain structure in lithium niobate on insulator.
Opt Express
; 31(23): 37464-37471, 2023 Nov 06.
Article
em En
| MEDLINE
| ID: mdl-38017874
ABSTRACT
Lithium niobate on insulator (LNOI) is a powerful platform for integrated photonic circuits. Recently, advanced applications in nonlinear and quantum optics require to controllably fabricate nano-resolution domain structures in LNOI. Here, we report on the fabrication of stable domain structures with sub-100â
nm feature size through piezoelectric force microscopy (PFM) tip poling in a z-cut LNOI. In experiment, the domain dot with an initial diameter of 80â
nm and the domain line with an initial width of 50â
nm can survive after a storage of more than 3 months. Particularly, we demonstrate the successful fabrication of 1D stable domain array with a period down to 100â
nm and a duty cycle of â¼50%. Our method paves the way to precisely manipulate frequency conversion and quantum entanglement on an LNOI chip.
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01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Opt Express
Ano de publicação:
2023
Tipo de documento:
Article