On-chip multi-beam frequency shifter through sideband separation.

In this paper, we introduce a novel method to realize a multi-beam optical frequency shifting component for photonic integrated circuits, utilizing an array of parallel optical modulators and a free-propagation region (FPR), such as a slab waveguide-based star coupler. This component generates multiple optical beams with different frequency shifts, making it suitable for various systems, such as multi-beam laser Doppler vibrometry (LDV). We thoroughly elaborate on the working principle of the component through theoretical analysis and demonstrate that by applying periodic wave-like modulation in the modulator array, the discrete harmonic content of the light can be selectively directed to different outputs based on the delay between consecutive modulators. A design comprising a 16-element modulator array and 5 outputs will be presented. Simulations show that this design can generate and collect 5 different harmonics (-2, -1, 0, +1, +2) in the different outputs with a side band suppression ratio of 20 dB to 30 dB for each output. Our proposed design is just one possibility and the component can be modified and optimized for specific applications.

Miniaturization of Laser Doppler Vibrometers-A Review.

Laser Doppler vibrometry (LDV) is a non-contact vibration measurement technique based on the Doppler effect of the reflected laser beam. Thanks to its feature of high resolution and flexibility, LDV has been used in many different fields today. The miniaturization of the LDV systems is one important development direction for the current LDV systems that can enable many new applications. In this paper, we will review the state-of-the-art method on LDV miniaturization. Systems based on three miniaturization techniques will be discussed: photonic integrated circuit (PIC), self-mixing, and micro-electrochemical systems (MEMS). We will explain the basics of these techniques and summarize the reported miniaturized LDV systems. The advantages and disadvantages of these techniques will also be compared and discussed.

Nonlinear signal errors in homodyne laser Doppler vibrometry induced by strong second-order ghost reflections and their mitigation.

A variety of mechanisms can induce distortions in the output signals of a homodyne laser Doppler vibrometer (LDV). In this paper, the nonlinear LDV distortions caused by a strong second-order ghost reflection originating from lens flares are theoretically explained and analyzed. We propose a simple compensation method to mitigate this distortion. The performance and limitations of this method are also explained both in simulation and in experiment.

Gold-induced photothermal background in on-chip surface enhanced stimulated Raman spectroscopy.

Surface enhanced Raman spectroscopy (SERS) and stimulated Raman spectroscopy (SRS) are well established techniques capable of boosting the strength of Raman scattering. The combination of both techniques (surface enhanced stimulated Raman spectroscopy, or SE-SRS) has been reported using plasmonic nanoparticles. In parallel, waveguide enhanced Raman spectroscopy has been developed using nanophotonic and nanoplasmonic waveguides. Here, we explore SE-SRS in nanoplasmonic waveguides. We demonstrate that a combined photothermal and thermo-optic effect in the gold material induces a strong background signal that limits the detection limit for the analyte. The experimental results are in line with theoretical estimates. We propose several methods to reduce or counteract this background.

Ultra-sensitive slot-waveguide-enhanced Raman spectroscopy for aqueous solutions of non-polar compounds using a functionalized silicon nitride photonic integrated circuit.

We demonstrate an ultra-sensitive waveguide-enhanced Raman sensor for low concentration organic compounds dissolved in water. The spectra are obtained using silicon nitride slot waveguides coated with a thin film of hexamethyldisilazane-modified mesoporous silica. Enriched locally by 600-fold within the coating, a micromolar level of cyclohexanone is probed. The sensor is also capable of simultaneous quantification of multiple analytes, and the adsorbed analytes can be completely released from the coating. These properties make this on-chip Raman sensor promising for diverse applications, especially for the monitoring of non-polar organics and biomolecules in aqueous environments.

A Miniaturised, Fully Integrated NDIR CO2 Sensor On-Chip.

In this paper, we present a fully integrated Non-dispersive Infrared (NDIR) CO2 sensor implemented on a silicon chip. The sensor is based on an integrating cylinder with access waveguides. A mid-IR LED is used as the optical source, and two mid-IR photodiodes are used as detectors. The fully integrated sensor is formed by wafer bonding of two silicon substrates. The fabricated sensor was evaluated by performing a CO2 concentration measurement, showing a limit of detection of ∼750 ppm. The cross-sensitivity of the sensor to water vapor was studied both experimentally and numerically. No notable water interference was observed in the experimental characterizations. Numerical simulations showed that the transmission change induced by water vapor absorption is much smaller than the detection limit of the sensor. A qualitative analysis on the long term stability of the sensor revealed that the long term stability of the sensor is subject to the temperature fluctuations in the laboratory. The use of relatively cheap LED and photodiodes bare chips, together with the wafer-level fabrication process of the sensor provides the potential for a low cost, highly miniaturized NDIR CO2 sensor.

Mitigation of photon background in nanoplasmonic all-on-chip Raman sensors.

In the quest for a more compact and cheaper Raman sensor, photonic integration and plasmonic enhancement are central. Nanoplasmonic slot waveguides exhibit the benefits of SERS substrates while being compatible with photonic integration and mass-scale (CMOS) fabrication. A difficulty in pursuing further integration of the Raman sensor with lasers, spectral filters, spectrometers and interconnecting waveguides lies in the presence of a photon background generated by the excitation laser field in any dielectric waveguide constituting those elements. Here, we show this problem can be mitigated by using a multi-mode interferometer and a nanoplasmonic slot waveguide operated in back-reflection to greatly suppress the excitation field behind the sensor while inducing very little photon background.

Transfer-print integration of GaAs p-i-n photodiodes onto silicon nitride waveguides for near-infrared applications.

We demonstrate waveguide-detector coupling through the integration of GaAs p-i-n photodiodes (PDs) on top of silicon nitride grating couplers (GCs) by means of transfer-printing. Both single device and arrayed printing is demonstrated. The photodiodes exhibit dark currents below 20 pA and waveguide-referred responsivities of up to 0.30 A/W at 2V reverse bias, corresponding to an external quantum efficiency of 47% at 860 nm. We have integrated the detectors on top of a 10-channel on-chip arrayed waveguide grating (AWG) spectrometer, made in the commercially available imec BioPIX-300 nm platform.

3D-printed optical probes for wafer-level testing of photonic integrated circuits.

Wafer-level probing of photonic integrated circuits is key to reliable process control and efficient performance assessment in advanced production workflows. In recent years, optical probing of surface-coupled devices such as vertical-cavity lasers, top-illuminated photodiodes, or silicon photonic circuits with surface-emitting grating couplers has seen great progress. In contrast to that, wafer-level probing of edge-emitting devices with hard-to-access vertical facets at the sidewalls of deep-etched dicing trenches still represents a major challenge. In this paper, we address this challenge by introducing a novel concept of optical probes based on 3D-printed freeform coupling elements that fit into deep-etched dicing trenches on the wafer surface. Exploiting the design freedom and the precision of two-photon laser lithography, the coupling elements can be adapted to a wide variety of mode-field sizes. We experimentally demonstrate the viability of the approach by coupling light to edge-emitting waveguides on different integration platforms such as silicon photonics (SiP), silicon nitride (TriPleX), and indium phosphide (InP). Achieving losses down to 1.9 dB per coupling interface, we believe that 3D-printed coupling elements represent a key step towards highly reproducible wafer-level testing of edge-coupled photonic integrated circuits.

High-power single transverse and polarization mode VCSEL for silicon photonics integration.

We demonstrate a 6.5 mW single transverse and polarization mode GaAs-based oxide-confined VCSEL at 850 nm. High power is enabled by a relatively large oxide aperture and an epitaxial design for low resistance, low optical loss, and high slope efficiency VCSELs. With the oxide aperture supporting multiple polarization unrestrained transverse modes, single transverse and polarization mode operation is achieved by a transverse and polarization mode filter etched into the surface of the VCSEL. While the VCSEL is specifically designed for light source integration on a silicon photonic integrated circuit, its performance in terms of power, spectral purity, polarization, and beam properties are of great interest for a large range of applications.

High index contrast photonic platforms for on-chip Raman spectroscopy.

Nanophotonic waveguide enhanced Raman spectroscopy (NWERS) is a sensing technique that uses a highly confined waveguide mode to excite and collect the Raman scattered signal from molecules in close vicinity of the waveguide. The most important parameters defining the figure of merit of an NWERS sensor include its ability to collect the Raman signal from an analyte, i.e. "the Raman conversion efficiency" and the amount of "Raman background" generated from the guiding material. Here, we compare different photonic integrated circuit (PIC) platforms capable of on-chip Raman sensing in terms of the aforementioned parameters. Among the four photonic platforms under study, tantalum oxide and silicon nitride waveguides exhibit high signal collection efficiency and low Raman background. In contrast, the performance of titania and alumina waveguides suffers from a strong Raman background and a weak signal collection efficiency, respectively.

Mitigation of speckle noise in laser Doppler vibrometry by using a scanning average method.

We present a scanning average method used in laser Doppler vibrometry systems for mitigating the noise induced by dynamic speckles. In this method, the measurement beam is scanned over the target surface within the area of interest at a relatively high frequency. Then an averaging operation (e.g., low-pass filtering) is applied to the acquired photocurrent signals to remove the impacts of the scan. Movement signals recovered from the averaged photocurrents turn out to have lower speckle-induced noise. We report the experimental demonstration of this technique through the use of a silicon-based photonic integrated circuit.

High extinction ratio on-chip pump-rejection filter based on cascaded grating-assisted contra-directional couplers in silicon nitride rib waveguides.

We present an on-chip filter that is based on the grating-assisted contra-directional coupler (GACDC) implemented on a silicon nitride rib waveguide platform. This filter enjoys the benefit of an unlimited free spectral range (FSR) on the red side of the stop/passband. Unlike a Bragg reflector, the GACDC filter has the advantage of coupling the rejected light contra-directionally into a bus waveguide, instead of reflecting it back to the input. This property makes it an add/drop filter suitable for pump rejection and allows effective cascading to provide an even higher extinction ratio compared to the single-stage version. In this Letter, we experimentally demonstrate that a 16-stage cascaded GACDC filter can provide a stop band with a bandwidth smaller than 3 nm and an extinction ratio as high as 68.5 dB.

Integrated silicon nitride electro-optic modulators with atomic layer deposited overlays.

Silicon nitride (SiN) is currently the most prominent CMOS-compatible platform for photonics at wavelengths <1 µm. However, realizing fast electro-optic (EO) modulators, the key components of any integrated optics platform, remains challenging in SiN. Modulators based on the plasma dispersion effect, as in silicon, are not available. Despite the fact that significant second-harmonic generation has been reported for silicon-rich SiN, no efficient Pockels effect-based modulators have been demonstrated. Here we report the back-end CMOS-compatible atomic layer deposition (ALD) of conventional second-order nonlinear crystals, zinc oxide, and zinc sulfide, on existing SiN waveguide circuits. Using these ALD overlays, we demonstrate EO modulation in ring resonators.

On-Chip Non-Dispersive Infrared CO2 Sensor Based On an Integrating Cylinder.

In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO2 sensor implemented on a silicon chip. The sensor has a simple structure, consisting of a hollow metallic cylindrical cavity along with access waveguides. A detailed analysis of the proposed sensor is presented. Simulation with 3D ray tracing shows that an integrating cylinder with 4 mm diameter gives an equivalent optical path length of 3 . 5 cm. The sensor is fabricated using Deep Reactive Ion Etching (DRIE) and wafer bonding. The fabricated sensor was evaluated by performing a CO2 concentration measurement, showing a limit of detection of ∼100 ppm. The response time of the sensor is only ∼2.8 s, due to its small footprint. The use of DRIE-based waveguide structures enables mass fabrication, as well as the potential co-integration of flip-chip integrated midIR light-emitting diodes (LEDs) and photodetectors, resulting in a compact, low-power, and low-cost NDIR CO2 sensor.

Six-beam homodyne laser Doppler vibrometry based on silicon photonics technology.

This paper describes an integrated six-beam homodyne laser Doppler vibrometry (LDV) system based on a silicon-on-insulator (SOI) full platform technology, with on-chip photo-diodes and phase modulators. Electronics and optics are also implemented around the integrated photonic circuit (PIC) to enable a simultaneous six-beam measurement. Measurement of a propagating guided elastic wave in an aluminum plate (speed ≈ 909 m/s @ 61.5 kHz) is demonstrated.

Stimulated Raman spectroscopy of analytes evanescently probed by a silicon nitride photonic integrated waveguide.

We report, to the best of our knowledge, the first demonstration of stimulated Raman spectroscopy enhanced by a nanophotonic integrated circuit. The Raman response of low-concentration dimethyl sulfoxide is evanescently probed via centimeter-long wire waveguides. A signal enhancement of close to five orders of magnitude, as compared to the case of on-chip spontaneous Raman scattering, is demonstrated. This significant enhancement factor allows for the use of continuous-wave lasers with milliwatt-level power and uncooled detectors and, therefore, sets the basis of future all-on-a-chip Raman spectrometers suitable for both gas and liquid detection.

On-chip surface-enhanced Raman spectroscopy using nanosphere-lithography patterned antennas on silicon nitride waveguides.

A hybrid integration of nanoplasmonic antennas with silicon nitride waveguides enables miniaturized chips for surface-enhanced Raman spectroscopy at visible and near-infrared wavelengths. This integration can result in high-throughput SERS assays on low sampling volumes. However, current fabrication methods are complex and rely on electron-beam lithography, thereby obstructing the full use of an integrated photonics platform. Here, we demonstrate the electron-beam-free fabrication of gold nanotriangles on deep-UV patterned silicon nitride waveguides using nanosphere lithography. The localized surface-plasmon resonance of these nanotriangles is optimized for Raman excitation at 785 nm, resulting in a SERS substrate enhancement factor of 2.5 × 105. Furthermore, the SERS signal excited and collected through the waveguide is as strong as the free-space excited and collected signal through a high NA objective.

CMOS-compatible broadband co-propagative stationary Fourier transform spectrometer integrated on a silicon nitride photonics platform.

We demonstrate a novel type of Fourier Transform Spectrometer (FTS) that can be realized with CMOS compatible fabrication techniques. This FTS contains no moving components and is based on the direct detection of the interferogram generated by the interference of the evanescent fields of two co-propagating waveguide modes. The theoretical analysis indicates that this type of FTS inherently has a large bandwidth (>100 nm). The first prototype that is integrated on a Si3N4 waveguide platform is demonstrated and has an extremely small size (0.1 mm2). We introduce the operation principle and report on the preliminary experiments. The results show a moderately high resolution (6 nm) which is in good agreement with the theoretical prediction.

Gold nanodome SERS platform for label-free detection of protease activity.

Surface-enhanced Raman scattering provides a promising technology for sensitive and selective detection of protease activity by monitoring peptide cleavage. Not only are peptides and plasmonic hotspots similarly sized, Raman fingerprints also hold large potential for spectral multiplexing. Here, we use a gold-nanodome platform for real-time detection of trypsin activity on a CALNNYGGGGVRGNF substrate peptide. First, we investigate the spectral changes upon cleavage through the SERS signal of liquid-chromatography separated products. Next, we show that similar patterns are detected upon digesting surface-bound peptides. We demonstrate that the relative intensity of the fingerprints from aromatic amino acids before and after the cleavage site provides a robust figure of merit for the turnover rate. The presented method offers a generic approach for measuring protease activity, which is illustrated by developing an analogous substrate for endoproteinase Glu-C.