Enhancing Si3N4 Selectivity over SiO2 in Low-RF Power NF3-O2 Reactive Ion Etching: The Effect of NO Surface Reaction.

Highly selective etching of silicon nitride (Si3N4) and silicon dioxide (SiO2) has received considerable attention from the semiconductor community owing to its precise patterning and cost efficiency. We investigated the etching selectivity of Si3N4 and SiO2 in an NF3/O2 radio-frequency glow discharge. The etch rate linearly depended on the source and bias powers, whereas the etch selectivity was affected by the power and ratio of the gas mixture. We found that the selectivity can be controlled by lowering the power with a suitable gas ratio, which affects the surface reaction during the etching process. X-ray photoelectron spectroscopy of the Si3N4 and QMS measurements support the effect of surface reaction on the selectivity change by surface oxidation and nitrogen reduction with the increasing flow of O2. We suggest that the creation of SiOxNy bonds on the surface by NO oxidation is the key mechanism to change the etch selectivity of Si3N4 over SiO2.

Preparations and Thermal Properties of PDMS-AlN-Al2O3 Composites through the Incorporation of Poly(Catechol-Amine)-Modified Boron Nitride Nanotubes.

As one of the emerging nanomaterials, boron nitride nanotubes (BNNTs) provide promising opportunities for diverse applications due to their unique properties, such as high thermal conductivity, immense inertness, and high-temperature durability, while the instability of BNNTs due to their high surface induces agglomerates susceptible to the loss of their advantages. Therefore, the proper functionalization of BNNTs is crucial to highlight their fundamental characteristics. Herein, a simplistic low-cost approach of BNNT surface modification through catechol-polyamine (CAPA) interfacial polymerization is postulated to improve its dispersibility on the polymeric matrix. The modified BNNT was assimilated as a filler additive with AlN/Al2O3 filling materials in a PDMS polymeric matrix to prepare a thermal interface material (TIM). The resulting composite exhibits a heightened isotropic thermal conductivity of 8.10 W/mK, which is a ~47.27% increase compared to pristine composite 5.50 W/mK, and this can be ascribed to the improved BNNT dispersion forming interconnected phonon pathways and the thermal interface resistance reduction due to its augmented compatibility with the polymeric matrix. Moreover, the fabricated composite manifests a fire resistance improvement of ~10% in LOI relative to the neat composite sample, which can be correlated to the thermal stability shift in the TGA and DTA data. An enhancement in thermal permanence is stipulated due to a melting point (Tm) shift of ∼38.5 °C upon the integration of BNNT-CAPA. This improvement can be associated with the good distribution and adhesion of BNNT-CAPA in the polymeric matrix, integrated with its inherent thermal stability, good charring capability, and free radical scavenging effect due to the presence of CAPA on its surface. This study offers new insights into BNNT utilization and its corresponding incorporation into the polymeric matrix, which provides a prospective direction in the preparation of multifunctional materials for electric devices.

Removal of ethyl acetate in air by using different types of corona discharges generated in a honeycomb monolith structure coated with Pd/γ-alumina.

A method based on the corona discharge produced by high voltage alternating current (AC) and direct current (DC) over a Pd/γ-Al2O3 catalyst supported on a honeycomb structure monolith was developed to eliminate ethyl acetate (EA) from the air at atmospheric pressure. The characteristics of the AC and DC corona discharge generated inside the honeycomb structure monolith were investigated by varying the humidity, gas hourly space velocity (GHSV), and temperature. The results showed that the DC corona discharge is more stable and easily operated at different operating conditions such as humidity, GHSV, and gas temperature compared to the AC discharge. At a given applied voltage, the EA conversion in the DC honeycomb catalyst discharge is, therefore, higher compared with that in the AC honeycomb catalyst discharge (e.g., 96% of EA conversion compared with approximately 68%, respectively, at 11.2 kV). These new results can open opportunities for wide applications of DC corona discharge combined with honeycomb catalysts to VOC treatment.

A novel energy efficient path for nitrogen fixation using a non-thermal arc.

Plasma-assisted nitrogen fixation is a promising sustainable and clean alternative to the classical Haber-Bosch process. However, the high energy consumption and low production rate of plasma-assisted nitrogen fixation limit its application. This study shows that the non-thermal (non-equilibrium) enhancement of the arc plasma significantly reduces the energy consumption of nitrogen fixation. The highest energy efficiency with high NO selectivity is observed with a low specific energy input (SEI). However, the highest production rate is reached at a high SEI. The studied process offers high NO selectivity (up to 95%) with low energy consumption (∼48 GJ per tN) at 0.1 kJ L-1 SEI, which is much lower than the previously reported value of plasma-assisted atmospheric nitrogen fixation and is close to that of the Haber-Bosch process.

Efficient methane-to-acetylene conversion using low-current arcs.

The proliferation of natural gas production had led to increased utilization of methane as a raw material for chemicals. The most significant bottleneck in this process is the high activation energy of methane. This paper reports the direct conversion of methane to acetylene in a novel rotating arc driven by AC electrical power. By feeding a sufficiently high concentration of CH4 (greater than 43%) diluted in H2 (the discharge gas) through the arc column, a low specific energy requirement (SER) of 10.2 kW h kg-1 C2H2 was achieved. The use of hydrogen as the discharge gas strongly suppressed soot formation during the methane conversion process under high methane concentration conditions, resulting in a carbon balance of greater than 95% and a C2H2 selectivity of greater than 90% while maintaining a methane conversion rate of greater than 70%, depending on the conditions. The novel rotating arc enabled the elongation of the arc column itself, which controlled heat loss and improved the energy use for reaction. The ability to control the arc length based on low-current type arc generation has additional benefits for reaction enhancement. These results demonstrate that arc control, optimization of the reaction conditions, and a full understanding of reaction pathway are viable means for the energy-efficient direct conversion of methane to acetylene.