Two-Photon Microscopy with a Double-Wavelength Metasurface Objective Lens.

Two-photon microscopy is a key imaging technique in life sciences due to its superior deep-tissue imaging capabilities. Light-weight and compact two-photon microscopes are of great interest because of their applications for in vivo deep brain imaging. Recently, dielectric metasurfaces have enabled a new category of small and lightweight optical elements, including objective lenses. Here we experimentally demonstrate two-photon microscopy using a double-wavelength metasurface lens. It is specifically designed to focus 820 and 605 nm light, corresponding to the excitation and emission wavelengths of the measured fluorophors, to the same focal distance. The captured two-photon images are qualitatively comparable to the ones taken by a conventional objective lens. Our metasurface lens can enable ultracompact two-photon microscopes with similar performance compared to current systems that are usually based on graded-index-lenses. In addition, further development of tunable metasurface lenses will enable fast axial scanning for volumetric imaging.

Wide-angular-range and high-resolution beam steering by a metasurface-coupled phased array.

Optical beam steering has broad applications in lidar, optical communications, optical interconnects, and spatially resolved optical sensors. For high-speed applications, phased-array-based beam-steering methods are favored over mechanical methods, as they are unconstrained by inertia and can inherently operate at a higher speed. However, phased-array systems exhibit a tradeoff between angular range and beam divergence, making it difficult to achieve both a large steering angle and a narrow beam divergence. Here, we present a beam-steering method based on wavefront shaping through a disorder-engineered metasurface that circumvents this range-resolution tradeoff. We experimentally demonstrate that, through this technique, one can continuously steer an optical beam within a range of 160° (80° from normal incidence) with an angular resolution of about 0.01° at the cost of beam throughput.

Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies.

We report transmissive color filters based on subwavelength dielectric gratings that can replace conventional dye-based color filters used in backside-illuminated CMOS image sensor (BSI CIS) technologies. The filters are patterned in an 80 nm-thick poly silicon film on a 115 nm-thick SiO2 spacer layer. They are optimized for operating at the primary RGB colors, exhibit peak transmittance of 60-80%, and have an almost insensitive response over a ± 20° angular range. This technology enables shrinking of the pixel sizes down to near a micrometer.

Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures.

We propose and experimentally demonstrate a planar array of optical bandpass filters composed of low loss dielectric metasurface layers sandwiched between two distributed Bragg reflectors (DBRs). The two DBRs form a Fabry-Pérot resonator whose center wavelength is controlled by the design of the transmissive metasurface layer which functions as a phase shifting element. We demonstrate an array of bandpass filters with spatially varying center wavelengths covering a wide range of operation wavelengths of 250nm around λ = 1550nm (Δλ/λ = 16%). The center wavelengths of each filter are independently controlled only by changing the in-plane geometry of the sandwiched metasurfaces, and the experimentally measured quality factors are larger than 700. The demonstrated filter array can be directly integrated on top of photodetector arrays to realize on-chip high-resolution spectrometers with free-space coupling.

High efficiency double-wavelength dielectric metasurface lenses with dichroic birefringent meta-atoms.

Metasurfaces are ultrathin optical structures that manipulate optical wavefronts. Most metasurface devices which deflect light are designed for operation at a single wavelength, and their function changes as the wavelength is varied. Here we propose and demonstrate a double-wavelength metasurface based on polarization dependent dielectric meta-atoms that control the phases of two orthogonal polarizations independently. Using this platform, we design lenses that focus light at 915 and 780 nm with perpendicular linear polarizations to the same focal distance. Lenses with numerical apertures up to 0.7 and efficiencies from 65% to above 90% are demonstrated. In addition to the high efficiency and numerical aperture, an important feature of this technique is that the two operation wavelengths can be chosen to be arbitrarily close. These characteristics make these lenses especially attractive for fluorescence microscopy applications.

High resolution on-chip optical filter array based on double subwavelength grating reflectors.

An optical filter array consisting of vertical narrow-band Fabry-Pérot (FP) resonators formed by two highly reflective high contrast subwavelength grating mirrors is reported. The filters are designed to cover a wide range of operation wavelengths (Δλ/λ = 5%) just by changing the in-plane grating parameters while the device thickness is maintained constant. Operation in the telecom band with transmission efficiencies greater than 40% and quality factors greater than 1,000 are measured experimentally for filters fabricated on the same substrate.

Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers.

Light emitted from single-mode semiconductor lasers generally has large divergence angles, and high numerical aperture lenses are required for beam collimation. Visible and near infrared lasers are collimated using aspheric glass or plastic lenses, yet collimation of mid-infrared quantum cascade lasers typically requires more costly aspheric lenses made of germanium, chalcogenide compounds, or other infrared-transparent materials. Here we report mid-infrared dielectric metasurface flat lenses that efficiently collimate the output beam of single-mode quantum cascade lasers. The metasurface lenses are composed of amorphous silicon posts on a flat sapphire substrate and can be fabricated at low cost using a single step conventional UV binary lithography. Mid-infrared radiation from a 4.8 µm distributed-feedback quantum cascade laser is collimated using a polarization insensitive metasurface lens with 0.86 numerical aperture and 79% transmission efficiency. The collimated beam has a half divergence angle of 0.36° and beam quality factor of M2=1.02.

Emission wavelength tuning by mechanical stressing of GaAs/Ge/Si microbeams.

We propose an approach for tuning a gain spectrum of semiconductor lasers under temperature fluctuations, where the heat-induced effect is dynamically compensated using a mechanical stressing. By stressing GaAs/Ge/Si microbeams, emission wavelength tuning is experimentally demonstrated for the overlying GaAs layers as a proof-of-concept, and the results are followed by theoretical calculations. It is discussed that this approach is effective to cancel the gain spectrum shift and will be indispensable to the integration of light sources toward WDM systems on a chip.

Increasing efficiency of high numerical aperture metasurfaces using the grating averaging technique.

One of the important advantages of optical metasurfaces over conventional diffractive optical elements is their capability to efficiently deflect light by large angles. However, metasurfaces are conventionally designed using approaches that are optimal for small deflection angles and their performance for designing high numerical aperture devices is not well quantified. Here we introduce and apply a technique for the estimation of the efficiency of high numerical aperture metasurfaces. The technique is based on a particular coherent averaging of diffraction coefficients of periodic blazed gratings and can be used to compare the performance of different metasurface designs in implementing high numerical aperture devices. Unlike optimization-based methods that rely on full-wave simulations and are only practicable in designing small metasurfaces, the gradient averaging technique allows for the design of arbitrarily large metasurfaces. Using this technique, we identify an unconventional metasurface design and experimentally demonstrate a metalens with a numerical aperture of 0.78 and a measured focusing efficiency of 77%. The grating averaging is a versatile technique applicable to many types of gradient metasurfaces, thus enabling highly efficient metasurface components and systems.

MEMS-tunable dielectric metasurface lens.

Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-µm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 µm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.

Wavefront shaping with disorder-engineered metasurfaces.

Recently, wavefront shaping with disordered media has demonstrated optical manipulation capabilities beyond those of conventional optics, including extended volume, aberration-free focusing and subwavelength focusing. However, translating these capabilities to useful applications has remained challenging as the input-output characteristics of the disordered media (P variables) need to be exhaustively determined via O(P) measurements. Here, we propose a paradigm shift where the disorder is specifically designed so its exact input-output characteristics are known a priori and can be used with only a few alignment steps. We implement this concept with a disorder-engineered metasurface, which exhibits additional unique features for wavefront shaping such as a large optical memory effect range in combination with a wide angular scattering range, excellent stability, and a tailorable angular scattering profile. Using this designed metasurface with wavefront shaping, we demonstrate high numerical aperture (NA > 0.5) focusing and fluorescence imaging with an estimated ~2.2×108 addressable points in an ~8 mm field of view.

Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass.

Due to its high refractive index and low absorption coefficient, gallium phosphide is an ideal material for photonic structures targeted at the visible wavelengths. However, these properties are only realized with high quality epitaxial growth, which limits substrate choice and thus possible photonic applications. In this work, we report the fabrication of single crystal gallium phosphide thin films on transparent glass substrates via transfer bonding. GaP thin films on Si (001) and (112) grown by MOCVD are bonded to glass, and then the growth substrate is removed with a XeF2 vapor etch. The resulting GaP films have surface roughnesses below 1 nm RMS and exhibit room temperature band edge photoluminescence. Magnesium doping yielded p-type films with a carrier density of 1.6 × 1017 cm-3 that exhibited mobilities as high as 16 cm2V-1s-1. Due to their unique optical properties, these films hold much promise for use in advanced optical devices.

Decoupling optical function and geometrical form using conformal flexible dielectric metasurfaces.

Physical geometry and optical properties of objects are correlated: cylinders focus light to a line, spheres to a point and arbitrarily shaped objects introduce optical aberrations. Multi-functional components with decoupled geometrical form and optical function are needed when specific optical functionalities must be provided while the shapes are dictated by other considerations like ergonomics, aerodynamics or aesthetics. Here we demonstrate an approach for decoupling optical properties of objects from their physical shape using thin and flexible dielectric metasurfaces which conform to objects' surface and change their optical properties. The conformal metasurfaces are composed of silicon nano-posts embedded in a polymer substrate that locally modify near-infrared (λ=915 nm) optical wavefronts. As proof of concept, we show that cylindrical lenses covered with metasurfaces can be transformed to function as aspherical lenses focusing light to a point. The conformal metasurface concept is highly versatile for developing arbitrarily shaped multi-functional optical devices.

Multiwavelength metasurfaces through spatial multiplexing.

Metasurfaces are two-dimensional arrangements of optical scatterers rationally arranged to control optical wavefronts. Despite the significant advances made in wavefront engineering through metasurfaces, most of these devices are designed for and operate at a single wavelength. Here we show that spatial multiplexing schemes can be applied to increase the number of operation wavelengths. We use a high contrast dielectric transmittarray platform with amorphous silicon nano-posts to demonstrate polarization insensitive metasurface lenses with a numerical aperture of 0.46, that focus light at 915 and 1550 nm to the same focal distance. We investigate two different methods, one based on large scale segmentation and one on meta-atom interleaving, and compare their performances. An important feature of this method is its simple generalization to adding more wavelengths or new functionalities to a device. Therefore, it provides a relatively straightforward method for achieving multi-functional and multiwavelength metasurface devices.

Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations.

Optical metasurfaces are two-dimensional arrays of nano-scatterers that modify optical wavefronts at subwavelength spatial resolution. They are poised to revolutionize optics by enabling complex low-cost systems where multiple metasurfaces are lithographically stacked and integrated with electronics. For imaging applications, metasurface stacks can perform sophisticated image corrections and can be directly integrated with image sensors. Here we demonstrate this concept with a miniature flat camera integrating a monolithic metasurface lens doublet corrected for monochromatic aberrations, and an image sensor. The doublet lens, which acts as a fisheye photographic objective, has a small f-number of 0.9, an angle-of-view larger than 60° × 60°, and operates at 850 nm wavelength with 70% focusing efficiency. The camera exhibits nearly diffraction-limited image quality, which indicates the potential of this technology in the development of optical systems for microscopy, photography, and computer vision.

Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission.

Metasurfaces are planar structures that locally modify the polarization, phase and amplitude of light in reflection or transmission, thus enabling lithographically patterned flat optical components with functionalities controlled by design. Transmissive metasurfaces are especially important, as most optical systems used in practice operate in transmission. Several types of transmissive metasurface have been realized, but with either low transmission efficiencies or limited control over polarization and phase. Here, we show a metasurface platform based on high-contrast dielectric elliptical nanoposts that provides complete control of polarization and phase with subwavelength spatial resolution and an experimentally measured efficiency ranging from 72% to 97%, depending on the exact design. Such complete control enables the realization of most free-space transmissive optical elements such as lenses, phase plates, wave plates, polarizers, beamsplitters, as well as polarization-switchable phase holograms and arbitrary vector beam generators using the same metamaterial platform.

Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays.

Flat optical devices thinner than a wavelength promise to replace conventional free-space components for wavefront and polarization control. Transmissive flat lenses are particularly interesting for applications in imaging and on-chip optoelectronic integration. Several designs based on plasmonic metasurfaces, high-contrast transmitarrays and gratings have been recently implemented but have not provided a performance comparable to conventional curved lenses. Here we report polarization-insensitive, micron-thick, high-contrast transmitarray micro-lenses with focal spots as small as 0.57 λ. The measured focusing efficiency is up to 82%. A rigorous method for ultrathin lens design, and the trade-off between high efficiency and small spot size (or large numerical aperture) are discussed. The micro-lenses, composed of silicon nano-posts on glass, are fabricated in one lithographic step that could be performed with high-throughput photo or nanoimprint lithography, thus enabling widespread adoption.