Glucose Concentration Measurement by All-Grating-Based System.

An accurate, easy setup, low-cost, and time-saving method for measuring glucose concentration was proposed. An all-grating-based glucose concentration measurement system contained moving-grating-based heterodyne interferometry and a grating-based self-align sensor. By combining the first-order diffraction lights from two separated moving gratings by a polarization beam splitter and creating S- and P-polarized light interference by an analyzer, the interference signal could be a heterodyne light source with a heterodyne frequency depending on the relative velocities of the two moving gratings. Next, a grating-based self-align sensor was used to make the optical configuration setup easy and accurate. Moreover, the sensor was deposited on GOx film to improve the measurement sensitivity and specificity for glucose. Finally, the phase change induced by the reaction of the sensor and glucose solutions was detected. The validity of this method was proved, and the measurement resolution can reach 2 mg/dL.

Designing Highly Precise Overlay Targets for Asymmetric Sidewall Structures Using Quasi-Periodic Line Widths and Finite-Difference Time-Domain Simulation.

The present study introduces an optimized overlay target design to minimize the overlay error caused by asymmetric sidewall structures in semiconductor manufacturing. To achieve this goal, the overlay error formula was derived by separating the asymmetric bottom grating structure into symmetric and asymmetric parts. Based on this formula, it was found that the overlay target design with the linewidth of the bottom grating closed to the grating period could effectively reduce the overlay error caused by the sidewall asymmetry structure. Simulation results demonstrate that the proposed design can effectively control the measurement error of different wavelengths within ±0.3 nm, even under varying sidewall angles and film thicknesses. Overall, the proposed overlay target design can significantly improve the overlay accuracy in semiconductor manufacturing processes.

Optimized wavelength selection for diffraction-based overlay measurement by minimum asymmetry factor variation with finite-difference time-domain simulation.

A robust and wafer-less wavelength selection methodology was proposed. An overlay calculation model considering the asymmetric bottom grating structure showed that additional intensities diffracted from the asymmetric structure caused the overlay error. An asymmetry factor was introduced to describe the intensity ratio of the original overlay mark and a mark with bottom grating only. Based on the simulation results, the optimized wavelength was selected by analyzing the wavelength at which there is the minimum variation of the asymmetry factor. Four cases were tested by the simulation, and the maximum overlay error of the optimized wavelength selected by this method was 0.21 nm.

Design and fabrication of a downlight luminaire with a dual frusto-conical reflector.

A design method and corresponding fabrication procedures are proposed for a dual frusto-conical reflector of a downlight luminaire. The profile of the dual frusto-conical reflector consists of two flat-slant reflective surfaces with slightly different slopes. The optimum dual frusto-conical reflector can be obtained with the proposed design method. The finished product of the dual frusto-conical reflector is fabricated by a 3D printer and followed by surface polishing and reflection paint spraying. The measurement results show that luminaires exhibited 70% optimum illuminance confined within an illumination area of 1.8m2, and the optimum illumination intensity is at 252 lux. The optimum efficiency of the proposed luminaire can reach 158 lm/W for normal-white light-emitting diode (LED) and 119 lm/W for warm-white LED, respectively.

High-accuracy thickness measurement of a transparent plate with the heterodyne central fringe identification technique.

In a modified Twyman-Green interferometer, the optical path variation is measured with the heterodyne central fringe identification technique, as the light beam is focused by a displaced microscopic objective on the front/rear surface of the test transparent plate. The optical path length variation is then measured similarly after the test plate is removed. The geometrical thickness of the test plate can be calculated under the consideration of dispersion effect. This method has a wide measurable range and a high accuracy in the measurable range.

Alternative method for measuring the full-field refractive index of a gradient-index lens with normal incidence heterodyne interferometry.

A linearly/circularly polarized heterodyne light beam coming from a heterodyne light source with an electro-optic modulator in turn enters a modified Twyman-Green interferometer to measure the surface plane of a GRIN lens. Two groups of periodic sinusoidal segments recorded by a fast complementary metal-oxide semiconductor camera are modified, and their associated phases are derived with the unique technique. The data are substituted into the special equations derived from the Fresnel equations, and the refractive index can be obtained. When the processes are applied to other pixels, the full-field refractive-index distribution can be obtained similarly. Its validity is demonstrated.

Method for gauge block measurement with the heterodyne central fringe identification technique.

In a modified Michelson interferometer, the top face of the wringing platen is first identified using the heterodyne central fringe identification technique. Then the reference mirror located in the other arm is moved by a precision translation stage until the top face of the tested gauge block is also identified with the same technique. The displacement of the mirror is exactly equivalent to the length of the tested gauge block. The measurable range of the interferometer relates to the maximum travel range of the translation stage and its uncertainty depends on the uncertainty of the heterodyne central fringe identification method and the resolution of the translation stage.