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We demonstrate two broadband multispectral infrared (3.5-11.5 µm), zoom (3×) systems with focal lengths adjustable from 50 mm to 150 mm. Both systems are successful in meeting the modulation transfer function (MTF) requirement of 20 lp/mm. The difference between the two designs is that one employs novel infrared-transparent glasses that permit the designer to achieve an improved system performance with dramatically fewer lens elements. The impact of these materials on the design performance is discussed in terms of MTF and chromatic focal shift as a function of temperature, and we conclude with a brief description of these new glasses and their optical functionality.
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In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiN x waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.
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We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from Ge23Sb7S70 chalcogenide glass (ChG) on CaF2 substrates by combing photolithographic patterning and focused ion beam milling. The waveguide-coupled cavities were characterized using a fiber end fire coupling method at 5.2 µm wavelength, and a loaded quality factor of ~2000 was measured near the critical coupling regime.
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We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2×10(5) at 5.2 µm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits.
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Structural relaxation behavior of N-BK7 glass was characterized at temperatures 20 °C above and below T(12) for this glass, using a thermo mechanical analyzer (TMA). T(12) is a characteristic temperature corresponding to a viscosity of 10(12) Pa·s. The glass was subject to quick temperature down-jumps preceded and followed by long isothermal holds. The exponential-like decay of the sample height was recorded and fitted using a unique Prony series method. The result of his method was a plot of the fit parameters revealing the presence of four distinct peaks or distributions of relaxation times. The number of relaxation times decreased as final test temperature was increased. The relaxation times did not shift significantly with changing temperature; however, the Prony weight terms varied essentially linearly with temperature. It was also found that the structural relaxation behavior of the glass trended toward single exponential behavior at temperatures above the testing range. The result of the analysis was a temperature-dependent Prony series model that can be used in finite element modeling of glass behavior in processes such as precision glass molding (PGM).
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Selective exposure to visible light is used to permanently trim the resonant wavelengths of coupled ring-resonator filters and delay-lines realized on a chalcogenide As2S3 platform. Post-fabrication manipulation of the circuit parameters has proved an effective tool to compensate for technological tolerances, targeting demanding specifications in photonic integrated circuits with no need for always-on power-hungry actuators. The same approach opens a way to realize photonic integrated circuits that can be reconfigured after fabrication to fulfill specific applications.
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In this paper, attributes of chalcogenide glass (ChG) based integrated devices are discussed in detail, including origins of optical loss and processing steps used to reduce their contributions to optical component performance. Specifically, efforts to reduce loss and tailor optical characteristics of planar devices utilizing solution-based glass processing and thermal reflow techniques are presented and their results quantified. Post-fabrication trimming techniques based on the intrinsic photosensitivity of the chalcogenide glass are exploited to compensate for fabrication imperfections of ring resonators. Process parameters and implications on enhancement of device fabrication flexibility are presented.
Assuntos
Calcogênios/química , Tecnologia de Fibra Óptica/instrumentação , Vidro/química , Fotometria/instrumentação , Refratometria/instrumentação , Transdutores , Desenho de Equipamento , Análise de Falha de Equipamento , Raios Infravermelhos , Teste de Materiais , Integração de SistemasRESUMO
Theoretical calculations based on time-dependent density functional theory are used to characterize the electronic absorption spectrum of a heteroleptic Ti-alkoxide molecule, (OPy)(2)Ti(TAP)(2) [OPy = pyridine carbinoxide, TAP = 2,4,6 tris(dimethylamino)phenoxide] under investigation as a photosensitive precursor for use in optically initiated solution synthesis of the metal oxide. Computational results support the assignment of UV absorption features observed in solid-state precursor films to key intrinsic ground-state transitions that involve ligand-to-metal charge transfer and pi-pi* transitions within the cyclic ligand moieties present. The nature of electron density redistribution associated with these transitions provides early insight into the excitation wavelength dependence of photostructural modification previously observed in this precursor system.
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Towards a future lab-on-a-chip spectrometer, we demonstrate a compact chip-scale air-clad silicon pedestal waveguide as a Mid-Infrared (Mid-IR) sensor capable of in situ monitoring of organic solvents. The sensor is a planar crystalline silicon waveguide, which is highly transparent, between λ = 1.3 and 6.5 µm, so that its operational spectral range covers most characteristic chemical absorption bands due to bonds such as C-H, N-H, O-H, C-C, N-O, C=O, and C≡N, as opposed to conventional UV, Vis, Near-IR sensors, which use weaker overtones of these fundamental bands. To extend light transmission beyond λ = 3.7 µm, a spectral region where a typical silicon dioxide under-clad is absorbing, we fabricate a unique air-clad silicon pedestal waveguide. The sensing mechanism of our Mid-IR waveguide sensor is based on evanescent wave absorption by functional groups of the surrounding chemical molecules, which selectively absorb specific wavelengths in the mid-IR, depending on the nature of their chemical bonds. From a measurement of the waveguide mode intensities, we demonstrate in situ identification of chemical compositions and concentrations of organic solvents. For instance, we show that when testing at λ = 3.55 µm, the Mid-IR sensor can distinguish hexane from the rest of the tested analytes (methanol, toluene, carbon tetrachloride, ethanol and acetone), since hexane has a strong absorption from the aliphatic C-H stretch at λ = 3.55 µm. Analogously, applying the same technique at λ = 3.3 µm, the Mid-IR sensor is able to determine the concentration of toluene dissolved in carbon tetrachloride, because toluene has a strong absorption at λ = 3.3 µm from the aromatic C-H stretch. With our demonstration of an air-clad silicon pedestal waveguide sensor, we move closer towards the ultimate goal of an ultra-compact portable spectrometer-on-a-chip.
Assuntos
Tetracloreto de Carbono/análise , Hexanos/análise , Dispositivos Lab-On-A-Chip , Silício/química , Tolueno/análise , Ar , Espectrofotometria Infravermelho/instrumentaçãoRESUMO
Polymer multilayered nanocoating capable of concentrating various chemical substances at IR-ATR waveguide surfaces is described. The coating affinity to an analyte played a pivotal role in sensitivity enhancement of the IR-ATR measurements, since the unmodified waveguide did not show any analyte detection.
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Ultraviolet (lambda=248 nm) excitation of a photosensitive Ti alkoxide solution was found to generate a metal-oxide-based insoluble film on substrates in contact with the solution during illumination. Patterned deposition of 100 microm wide lines of material was demonstrated using a slit-shaped aluminum shadow mask during exposure. Stylus profilometry confirmed that the average thickness of the photodeposited film monotonically varied with accumulated UV fluence, exhibiting thicknesses of 10 to 310 nm for fluences of 12 and 192 J/cm(2), respectively. Moreover, the surface profile of the film surface at fluences greater than 12 J/cm(2) was found to reproduce the near-field Fresnel diffraction pattern anticipated from the slit mask used.