1.
Opt Express
; 30(5): 6921-6933, 2022 Feb 28.
Artigo
em Inglês
| MEDLINE
| ID: mdl-35299466
RESUMO
We demonstrate post-fabrication target-wavelength trimming with a gallium phosphide on a silicon nitride integrated photonic platform using controlled electron-beam exposure of hydrogen silsesquioxane cladding. A linear relationship between the electron-beam exposure dose and resonant wavelength red-shift enables deterministic, individual trimming of multiple devices on the same chip to within 30 pm of a single target wavelength. Second harmonic generation from telecom to near infrared at a target wavelength is shown in multiple devices with quality factors on the order of 104. Post-fabrication tuning is an essential tool for targeted wavelength applications including quantum frequency conversion.