Enhancing Si3N4 Selectivity over SiO2 in Low-RF Power NF3-O2 Reactive Ion Etching: The Effect of NO Surface Reaction.

Highly selective etching of silicon nitride (Si3N4) and silicon dioxide (SiO2) has received considerable attention from the semiconductor community owing to its precise patterning and cost efficiency. We investigated the etching selectivity of Si3N4 and SiO2 in an NF3/O2 radio-frequency glow discharge. The etch rate linearly depended on the source and bias powers, whereas the etch selectivity was affected by the power and ratio of the gas mixture. We found that the selectivity can be controlled by lowering the power with a suitable gas ratio, which affects the surface reaction during the etching process. X-ray photoelectron spectroscopy of the Si3N4 and QMS measurements support the effect of surface reaction on the selectivity change by surface oxidation and nitrogen reduction with the increasing flow of O2. We suggest that the creation of SiOxNy bonds on the surface by NO oxidation is the key mechanism to change the etch selectivity of Si3N4 over SiO2.

Synthesis of solar-driven Cu-doped graphitic carbon nitride photocatalyst for enhanced removal of caffeine in wastewater.

Caffeine (CaF), a widely consumed compound, has been associated with various harmful effects on human health, including metabolic, cardiovascular disease, and reproductive disorders. Moreover, it poses a signifincant threat to organisms and aquatic ecosystems, leading to water pollution concerns. Therefore, the removal of CaF from wastewater is crucial for mitigating water pollution and minimizing its detrimental impacts on both humans and the environment. In this study, a solar-driven Cu-doped graphitic carbon nitride (Cu/CN) photocatalyst was synthesized and evaluated for its effectiveness in oxidizing CaF in wastewater. The Cu/CN photocatalyst, with a low band gap energy of 2.58eV, exhibited superior performance in degrading CaF compared to pure graphitic carbon nitride (CN). Under solar light irradiation, CuCN achieved a remarkable CaF degradation efficiency of 98.7% CaF, surpassing CN's efficiency of 74.5% by 24.2%. The synthesized Cu/CN photocatalyst demonstrated excellent removal capability, achieving a removal rate of over 88% for CaF in wastewater. Moreover, the reusability test showed that Cu/CN could be successfully reused up to five cycles maintaining a high removal efficiency of 74% for CaF in the fifth cycle. Additionally, the study elucidated the oxidation mechanism of CaF using solar-driven Cu/CN photocatalyst and highlighted the environmental implications of the process.

Rotary bi-layer ring-shaped metamaterials for reconfiguration absorbers: publisher's note.

This publisher's note corrects errors in Appl. Opt.61, 9078 (2022)APOPAI0003-693510.1364/AO.471949.

Rotary bi-layer ring-shaped metamaterials for reconfiguration absorbers.

A reconfigurable metamaterial absorber (MA) in the microwave region is numerically and experimentally demonstrated based on a multi-layered metamaterial. The proposed structure can be mechanically switched between two different configurations to obtain designated absorption behaviors. By rotating the upper ring layer by multiples of 90 deg, two separated absorption modes of the MA are created. The first configuration acts as a single-band absorber, while the second configuration performs multi-band perfect absorption. In addition, the proposed structure can be easily switched into two different configurations to obtain a designated absorption feature. Our work is expected to provide an effective approach to obtaining reconfigurable MAs, which are useful for various applications.

Emission of Unintentionally Produced Persistent Organic Pollutants from Some Industrial Processes in Northern Vietnam.

Concentrations of PCDD/Fs, dioxin-like PCBs (dl-PCBs), PeCB and HCB were determined in flue gas, fly ash and bottom ash samples collected from brick production, steel production, and zinc production plants, an industrial waste incinerator and a medical waste incinerator in northern Vietnam to understand the contamination levels, accumulation patterns and extent of emission. Total TEQs concentrations of PCDD/Fs and dl-PCBs in flue gas and ash samples from these industrial plants ranged from 0.304 to 50.55 pg/Nm3 and 1.43 to 440 pg/g, respectively. PeCB and HCB residues in flue gas samples ranged from 0.839 to 46.59 ng/Nm3 and 1.16 to 60.5 ng/Nm3, respectively. The emission factors of 4.8-740 ngTEQs/tonne for PCDD/Fs and dl-PCBs, 67.12-240.7 µg/ton for PeCB and 11.64-889.3 µg/ton for HCB were obtained in flue gas samples. This is among the first reports on the emission factor of PCDD/Fs, dl-PCBs, PeCB, HCB in brick production, zinc production and waste incineration in Vietnam.

Conductive polymer for ultra-broadband, wide-angle, and polarization-insensitive metamaterial perfect absorber.

We numerically and experimentally investigate a broadband, polarization-independent and wide-incident-angle metamaterial perfect absorber (MPA) based on conductive polymer. By optimizing the electrical conductivity of the polymer, a 16.7 GHz broadband MPA is observed with the absorptivity greater than 80% for both transverse magnetic and electric polarization. The measurement results performed in the range 8-18 GHz show a diametrical concatenation with simulation results and theoretical analysis. The absorption mechanism is explained by demonstrating the influence of polymer conductivity on the dissipated power, the equivalent impedance, and the induced electric field. Our work may contribute to further studies on broadband MPA using for various applications.

Unraveling Hydrogen Adsorption on Transition Metal-Doped [Mo3S13]2- Clusters: Insights from Density Functional Theory Calculations.

Molecular and dissociative hydrogen adsorption of transition metal (TM)-doped [Mo3S13]2- atomic clusters were investigated using density functional theory calculations. The introduced TM dopants form stable bonds with S atoms, preserving the geometric structure. The S-TM-S bridging bond emerges as the most stable configuration. The preferred adsorption sites were found to be influenced by various factors, such as the relative electronegativity, coordination number, and charge of the TM atom. Notably, the presence of these TM atoms remarkably improved the hydrogen adsorption activity. The dissociation of a single hydrogen molecule on TM[Mo3S13]2- clusters (TM = Sc, Cr, Mn, Fe, Co, and Ni) is thermodynamically and kinetically favorable compared to their bare counterparts. The extent of favorability monotonically depends on the TM impurity, with a maximum activation barrier energy ranging from 0.62 to 1.58 eV, lower than that of the bare cluster (1.69 eV). Findings provide insights for experimental research on hydrogen adsorption using TM-doped molybdenum sulfide nanoclusters, with potential applications in the field of hydrogen energy.

Sensing technique of silver nanoparticles as labels for immunoassay using liquid electrode plasma atomic emission spectrometry.

We report the use of liquid electrode plasma-atomic emission spectrometry (LEP-AES) in protein sensing studies employing Ag nanoparticle labeling. LEP-AES requires no plasma gas and no high-power source and is suitable for onsite portable analysis. Human chorionic gonadotropin (hCG) was used as a model target protein, and the immunoreaction in which hCG is sandwiched between two antibodies, one of which is immobilized on the microwell and the second is labeled with Ag nanoparticles, was performed. Sensing occurs at the narrow pass in the center of a quartz chip following oxidative dissolution of the Ag nanoparticles by nitric acid. hCG was analyzed in the range from 10 pg/mL to 1 ng/mL, and the detection limit for hCG was estimated at 1.3 pg/mL (22.8 fM). The proposed detection method has a wide variety of promising applications in metal-nanoparticle-labeled biomolecule detection.

Levels, profiles, and emission characteristics of chlorobenzenes in ash samples from some industrial thermal facilities in northern Vietnam.

Chlorobenzenes (CBzs) are unintentionally produced organic contaminants from different thermal industrial processes, which have been scarcely surveyed in Asian developing countries including Vietnam. In this study, residue concentrations, profiles, emission factors, and annual emissions of seven chlorobenzene compounds were investigated in fly ash and bottom ash samples of some industrial facilities including brick making plant, steel and zinc production plants, and industrial and municipal waste incinerators in northern Vietnam. Total concentrations of seven CBzs in the ash samples were generally decreased in the order: industrial waste incinerator > municipal waste incinerator > steel-making plant > brick making plant. Emission pattern of CBzs varied considerably among different industrial plants, with 1,2- and 1,3-dichloro-, 1,2,3,4-tetrachloro-, and hexachlorobenzene as predominant compounds in the industrial waste incinerators and steel-making plants. Emission factors of CBzs estimated for the fly ash and bottom ash samples were in the range of 118-2020 and 5.3-22,600 µg ton-1, respectively. Average annual emissions (AEs) of total seven CBzs estimated for fly ash and bottom ash in the investigated plants were in the range of 154-54,300 and 20,160-161,400 mg year-1, respectively. The AEs of CBzs estimated for fly ash in the steel-making plant were higher than those in the waste incinerators. Meanwhile, CBz emissions for bottom ash were the highest in the steel-making plant, followed by the industrial and municipal waste incinerators. This is among the first studies on the emission characteristics of both low and highly chlorinated benzenes from industrial activities in Vietnam.