Lyman-ß narrowband coatings with strong Lyman-α rejection.

Novel narrowband multilayer coatings efficient at a wavelength as short as 100 mn are presented, which pushes shortwards the existing limit of reported narrowband multilayers. Such limit had been established at ~120 nm, close to the MgF2 cutoff wavelength. The new multilayers combine layers of Al, LiF, and SiC, in an Al/LiF/SiC/LiF multilayer design (four layers, starting with the innermost layer). Among these materials, Al and LiF are deposited by evaporation and SiC by ion-beam-sputtering. In addition to a high, narrow peak close to H Lyman ß (102.6 nm), these multilayers simultaneously provide a very small reflectance at H Lyman α (121.6 nm). This combined performance is demanded in space instrumentation for astrophysics and solar physics observations among others, where imaging the sky at the important diagnostic spectral line of Lyman ß line requires rejecting the frequently much more intense background at Lyman α line. Such is the case for solar corona observations at Lyman ß, which is masked by the strong Lyman α line. The multilayer peak is placed close to another important diagnostic tool: the OVI doublet at 103.2 and 103.8 nm. The target of small reflectance at 121.6 nm was seen to be the most critical. The best strategy in multilayer preparation was to prepare it with such minimum reflectance at slightly shorter wavelengths so that the coating evolved to shift it longwards over time. Multilayers kept a remarkable 102.6 nm/121.6 nm reflectance ratio over time in spite of some performance degradation. Hence, a multilayer coating aged of 4 years kept a reflectance of 43% at 102.6 nm and 0.2% at 121.6 nm.

Transmittance and optical constants of Ca films in the 4-1000 eV spectral range.

The low expected absorption of Ca in the extreme ultraviolet (EUV) makes it an attractive material for multilayers and filters because most materials in nature strongly absorb the EUV. Few optical constant data had been reported for Ca. In this research, Ca films of various thicknesses were deposited on grid-supported C films and their transmittance measured in situ from the visible to the soft x-rays. The measurement range contains M2,3 and L2,3 absorption edges. Transmittance measurements were used to obtain the Ca extinction coefficient k. A minimum k of 0.017 was obtained at ∼23 eV, which makes Ca a promising low-absorption material for EUV coatings. A second spectral range of interest for its low absorption is below the Ca L3 edge at ∼343 eV. Measured k data and extrapolations were used to calculate the refractive index n using Kramers-Krönig relations. This is the first self-consistent data set on Ca covering a wide spectral range including the EUV.

Transmittance and optical constants of erbium films in the 3.25-1580 eV spectral range.

The optical constants of erbium (Er) films were obtained in the 3.25-1580 eV range from transmittance measurements performed at room temperature. Thin films of Er were deposited by evaporation in ultra high vacuum conditions and their transmittance was measured in situ. Substrates consisted of a thin C film supported on a grid. Transmittance measurements were used to obtain the extinction coefficient k of the Er films. The refractive index n of Er was calculated using the Kramers-Krönig analysis. k data were extrapolated both on the high- and low-energy parts of the spectrum by using experimental data and calculated k values available in the literature. Er, similar to other lanthanides, has a low-absorption band below the O(2,3) edge onset; the smallest absorption was measured at ~22.5 eV. Therefore, Er is a promising material for filters and multilayer coatings in the energy range below the O(2,3) edge, in which materials typically have an absorption stronger than at other energies. Good consistency of the data resulted from the application of f and inertial sum rules.

Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm.

A new type of multilayer coatings with narrowband reflection properties and peaked in the approximately 50- 92 nm spectral range has been developed. Multilayers are based on Yb, Al, and SiO films and they have been prepared by thermal evaporation. Efficient multilayers based on Yb and Al, with an SiO protective layer were prepared, but they developed a dendrite structure, which was attributed to the reactivity between Al and Yb. Multilayers based on Yb and Al, with both SiO protective and barrier layers, resulted in efficient reflective filters, with no observable dendrite growth. The peak reflectance of aged multilayers was of the order of approximately 0.20, with bandwidths in the range of 12 to 22 nm FWHM.

Electron-beam deposited boron coatings for the extreme ultraviolet.

Boron films deposited by evaporation with an electron-beam were found to have a relatively high reflectance in the extreme ultraviolet with values similar to those of ion-beam-sputtered (IBS) SiC and IBS B(4)C. The largest reflectance was measured for an 11 nm thick boron film. Some reflectance degradation was observed for boron films stored in a desiccator. Reflectance degradation varied from sample to sample and was found to be either similar to that of IBS SiC and IBS B(4)C or larger.

Optical constants of electron-beam evaporated boron films in the 6.8-900 eV photon energy range.

The optical constants of electron-beam evaporated boron from 6.8 to 900 eV were calculated through transmittance measurements of boron thin films deposited onto carbon-coated microgrids or LiF substrates in ultrahigh-vacuum conditions. In the low-energy part of the spectrum the measurements were performed in situ on freshly deposited samples, whereas in the high-energy range the samples were exposed to the atmosphere before the measurements. The extinction coefficient was calculated directly from the transmittance data, and a Kramers-Kronig analysis that combined the current data with data from the literature was performed to determine the dispersive part of the index of refraction. Finally, two different sum-rule tests were performed that indicated the good consistency of the data.