Research on a Precision Calibration Model of a Flexible Strain Sensor Based on a Variable Section Cantilever Beam.

The flexible strain sensor's measuring range is usually over 5000 µÎµ, while the conventional variable section cantilever calibration model has a measuring range within 1000 µÎµ. In order to satisfy the calibration requirements of flexible strain sensors, a new measurement model was proposed to solve the inaccurate calculation problem of the theoretical strain value when the linear model of a variable section cantilever beam was applied to a large range. The nonlinear relationship between deflection and strain was established. The finite element analysis of a variable section cantilever beam with ANSYS shows that the linear model's relative deviation is as high as 6% at 5000 µÎµ, while the relative deviation of the nonlinear model is only 0.2%. The relative expansion uncertainty of the flexible resistance strain sensor is 0.365% (k = 2). Simulation and experimental results show that this method solves the imprecision of the theoretical model effectively and realizes the accurate calibration of a large range of strain sensors. The research results enrich the measurement models and calibration models for flexible strain sensors and contribute to the development of strain metering.

High-precision method for submicron-aperture fiber point-diffraction wavefront measurement.

It is a key issue to measure the point-diffraction wavefront error, which determines the achievable accuracy of point-diffraction interferometer (PDI). A high-precision method based on shearing interferometry is proposed to measure submicron-aperture fiber point-diffraction wavefront with high numerical aperture (NA). To obtain the true shearing point-diffraction wavefront, a double-step calibration method based on three-dimensional coordinate reconstruction and symmetric lateral displacement compensation is proposed to calibrate the geometric aberration in the case of high NA and large lateral wavefront displacement. The calibration can be carried out without any prior knowledge about the system configuration parameters. With the true shearing wavefront, the differential Zernike polynomials fitting method is applied to reconstruct the point-diffraction wavefront. Numerical simulation and experiments have been carried out to demonstrate the accuracy and feasibility of the proposed measurement method, and a good measurement accuracy is achieved.

High-NA fiber point-diffraction interferometer for three-dimensional coordinate measurement.

The numerical aperture (NA) and power of diffraction wave in point-diffraction interferometer (PDI) could significantly limit the measurement range of the system. A fiber point-diffraction interferometer with high NA is proposed for the measurement of absolute three-dimensional coordinates. Based on the single-mode fiber with submicron aperture, the diffraction wave with both high NA and high power is obtained, by which the achievable measurement range of the PDI can be extended. A double-iterative method based on Levenbery-Marquardt algorithm is proposed to determine the three-dimensional coordinates under measurement. Numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed PDI system, with both high measurement precision and nice repeatability achieved.

Analysis of diffraction wavefront in visible-light point-diffraction interferometer.

As a key element in point-diffraction interferometer (PDI), the diffraction pinhole determines the sphericity of the reference wavefront and achievable precision of the testing system. The point-diffraction wavefront error, aperture angle, and light transmittance in the PDI operating at visible light, which are determined by pinhole dimension, are analyzed based on finite difference time domain (FDTD) method. The study shows that an aperture angle about 75° can be obtained with a 1 µm pinhole diameter, and the corresponding testing precision is better than root mean square λ/1000 within 0.35 NA. Both the numerical simulation and experiments have been carried out to demonstrate the feasibility of the proposed analysis approach, and a good agreement is obtained between calculated and measured parameters in visible-light PDI. The proposed simulation approach with the FDTD method provides a feasible way to analyze the diffraction wavefront in visible-light PDI, as well as a powerful tool for the design and optimization of PDI system.