Wet Etching of Silicon in Planar Nanochannels.

Silicon (Si) alkaline etching constitutes a fundamental process in the semiconductor industry. Although its etching kinetics on plain substrates have been thoroughly investigated, the kinetics of Si wet etching in nanoconfinements have yet to be fully explored despite its practical importance in three-dimensional (3-D) semiconductor manufacturing. Herein, we report the systematic study of potassium hydroxide (KOH) wet etching kinetics of amorphous silicon (a-Si)-filled two-dimensional (2-D) planar nanochannels. Our findings reveal that the etching rate would increase with the increase in nanochannel height before reaching a plateau, indicating a strong nonlinear confinement effect. Through investigation using etching solutions with different ionic strengths and/or different temperatures, we further find that both electrostatic interactions and the hydration layer inside the nanoconfinement contribute to the confinement-dependent etching kinetics. Our results offer fresh perspectives into the kinetic study of reactions in nanoconfinements and will shed light on the optimization of etching processes in the semiconductor industry.

Conductively coupled flexible silicon electronic systems for chronic neural electrophysiology.

Materials and structures that enable long-term, intimate coupling of flexible electronic devices to biological systems are critically important to the development of advanced biomedical implants for biological research and for clinical medicine. By comparison with simple interfaces based on arrays of passive electrodes, the active electronics in such systems provide powerful and sometimes essential levels of functionality; they also demand long-lived, perfect biofluid barriers to prevent corrosive degradation of the active materials and electrical damage to the adjacent tissues. Recent reports describe strategies that enable relevant capabilities in flexible electronic systems, but only for capacitively coupled interfaces. Here, we introduce schemes that exploit patterns of highly doped silicon nanomembranes chemically bonded to thin, thermally grown layers of SiO2 as leakage-free, chronically stable, conductively coupled interfaces. The results can naturally support high-performance, flexible silicon electronic systems capable of amplified sensing and active matrix multiplexing in biopotential recording and in stimulation via Faradaic charge injection. Systematic in vitro studies highlight key considerations in the materials science and the electrical designs for high-fidelity, chronic operation. The results provide a versatile route to biointegrated forms of flexible electronics that can incorporate the most advanced silicon device technologies with broad applications in electrical interfaces to the brain and to other organ systems.

Ultrathin, transferred layers of thermally grown silicon dioxide as biofluid barriers for biointegrated flexible electronic systems.

Materials that can serve as long-lived barriers to biofluids are essential to the development of any type of chronic electronic implant. Devices such as cardiac pacemakers and cochlear implants use bulk metal or ceramic packages as hermetic enclosures for the electronics. Emerging classes of flexible, biointegrated electronic systems demand similar levels of isolation from biofluids but with thin, compliant films that can simultaneously serve as biointerfaces for sensing and/or actuation while in contact with the soft, curved, and moving surfaces of target organs. This paper introduces a solution to this materials challenge that combines (i) ultrathin, pristine layers of silicon dioxide (SiO2) thermally grown on device-grade silicon wafers, and (ii) processing schemes that allow integration of these materials onto flexible electronic platforms. Accelerated lifetime tests suggest robust barrier characteristics on timescales that approach 70 y, in layers that are sufficiently thin (less than 1 µm) to avoid significant compromises in mechanical flexibility or in electrical interface fidelity. Detailed studies of temperature- and thickness-dependent electrical and physical properties reveal the key characteristics. Molecular simulations highlight essential aspects of the chemistry that governs interactions between the SiO2 and surrounding water. Examples of use with passive and active components in high-performance flexible electronic devices suggest broad utility in advanced chronic implants.

Carbon Nanotube-Doped 3D-Printed Silicone Electrode for Manufacturing Multilayer Porous Plasticized Polyvinyl Chloride Gel Artificial Muscles.

Plasticized polyvinyl chloride (PVC) gel has large deformation under an applied external electrical field and high driving stability in air and is a candidate artificial muscle material for manufacturing a flexible actuator. A porous PVC gel actuator consists of a mesh positive pole, a planar negative pole, and a PVC gel core layer. The current casting method is only suitable for manufacturing simple 2D structures, and it is difficult to produce multilayer porous structures. This study investigated the feasibility of a 3D-printed carbon nanotube-doped silicone electrode for manufacturing multilayer porous PVC gel artificial muscle. Carbon nanotube-doped silicone (CNT-PDMS) composite inks were developed for printing electrode layers of PVC gel artificial muscles. The parameters for the printing plane and mesh electrodes were explored theoretically and experimentally. We produced a CNT-PDMS electrode and PVC gel via integrated printing to manufacture multilayer porous PVC artificial muscle and verified its good performance.

Single-Electrode Electrostatic Repulsion Phenomenon for Remote Actuation and Manipulation.

One of the fundamental principles of electrostatics is that an uncharged object will be attracted to a charged object through electrostatic induction as the two approaches one another. We refer to the charged object as a single electrode and examine the scenario where a positive voltage is applied. Because of electrostatic induction phenomenon, single-electrode electrostatics only generates electrostatic attraction forces. Here, we discover that single-electrode electrostatics can generate electrostatic repulsion forces and define this new phenomenon as single-electrode electrostatic repulsion phenomenon. We investigate the fundamental electrostatic phenomena, giving a curve of electrostatic force versus voltage and then defining 3 regions. Remote actuation and manipulation are essential technologies that are of enormous concern, with tweezers playing an important role. Various tweezers designed on the basis of external fields of optics, acoustics, and magnetism can be used for remote actuation and manipulation, but some inherent drawbacks still exist. Tweezers would benefit greatly from our discovery in electrostatics. On the basis of this discovery, we propose the concept of electrostatic tweezers, which can achieve noncontact and remote actuation and manipulation. Experimental characterizations and successful applications in metamaterials, robots, and manipulating objects demonstrated that electrostatic tweezers can produce large deformation rates (>6,000%), fast actuation (>100 Hz), and remote manipulating distance (~15 cm) and have the advantages of simple device structure, easy control, lightweight, no dielectric breakdown, and low cost. Our work may deepen people's understanding of single-electrode electrostatics and opens new opportunities for remote actuation and manipulation.

Powerful UAV manipulation via bioinspired self-adaptive soft self-contained gripper.

Existing grippers for unmanned aerial vehicle (UAV) manipulation have persistent challenges, highlighting a need for grippers that are soft, self-adaptive, self-contained, easy to control, and lightweight. Inspired by tendril plants, we propose a class of soft grippers that are voltage driven and based on winding deformation for self-adaptive grasping. We design two types of U-shaped soft eccentric circular tube actuators (UCTAs) and propose using the liquid-gas phase-transition mechanism to actuate UCTAs. Two types of UCTAs are separately cross-arranged to construct two types of soft grippers, forming self-contained systems that can be directly driven by voltage. One gripper inspired by tendril climbers can be used for delicate grasping, and the other gripper inspired by hook climbers can be used for strong grasping. These grippers are ideal for deployment in UAVs because of their self-adaptability, ease of control, and light weight, paving the way for UAVs to achieve powerful manipulation with low positioning accuracy, no complex grasping planning, self-adaptability, and multiple environments.

Programmable Chemical Reactions Enable Ultrastrong Soft Pneumatic Actuation.

Soft pneumatic actuation is widely used in wearable devices, soft robots, artificial muscles, and surgery machines. However, generating high-pressure gases in a soft, controllable, and portable way remains a substantial challenge. Here, a class of programmable chemical reactions that can be used to controllably generate gases with a maximum pressure output of nearly 6 MPa is reported. It is proposed to realize the programmability of the chemical reaction process using thermoelectric material with programmable electric current and employing preprogrammed reversible chemical reactants. The programmable chemical reactions as soft pneumatic actuation can be operated independently as miniature gas sources (∼20-100 g) or combined with arbitrary physical structures to make self-contained machines, capable of generating unprecedented pressures of nearly 6 MPa or forces of about 18 kN in a controllable, portable, and silent manner. Striking demonstrations of breaking a brick, a marble, and concrete blocks, raising a sightseeing car, and successful applications in artificial muscles and soft assistive wearables illustrate tremendous application prospects of soft pneumatic actuation via programmable chemical reactions. The study establishes a new paradigm toward ultrastrong soft pneumatic actuation.

Reprogrammable, intelligent soft origami LEGO coupling actuation, computation, and sensing.

Tightly integrating actuation, computation, and sensing in soft materials allows soft robots to respond autonomously to their environments. However, fusing these capabilities within a single soft module in an efficient, programmable, and compatible way is still a significant challenge. Here, we introduce a strategy for integrating actuation, computation, and sensing capabilities in soft origami. Unified and plug-and-play soft origami modules can be reconfigured into diverse morphologies with specific functions or reprogrammed into a variety of soft logic circuits, similar to LEGO bricks. We built an untethered autonomous soft turtle that is able to sense stimuli, store data, process information, and perform swimming movements. The function multiplexing and signal compatibility of the origami minimize the number of soft devices, thereby reducing the complexity and redundancy of soft robots. Moreover, this origami also exhibits strong damage resistance and high durability. We envision that this work will offer an effective way to readily create on-demand soft robots that can operate in unknown environments.

Phase-transforming mechanical metamaterials with dynamically controllable shape-locking performance.

Active mechanical metamaterials with customizable structures and deformations, active reversible deformation, dynamically controllable shape-locking performance and stretchability are highly suitable for applications in soft robotics and flexible electronics, yet it is challenging to integrate them due to their mutual conflicts. Here, we introduce a class of phase-transforming mechanical metamaterials (PMMs) that integrate the above properties. Periodically arranging basic actuating units according to the designed pattern configuration and positional relationship, PMMs can customize complex and diverse structures and deformations. Liquid-vapor phase transformation provides active reversible large deformation while a silicone matrix offers stretchability. The contained carbonyl iron powder endows PMMs with dynamically controllable shape-locking performance, thereby achieving magnetically assisted shape locking and energy storing in different working modes. We build a theoretical model and finite element simulation to guide the design process of PMMs, so as to develop a variety of PMMs with different functions suitable for different applications, such as a programmed PMM, reconfigurable antenna, soft lens, soft mechanical memory, biomimetic hand, biomimetic flytrap and self-contained soft gripper. PMMs are applicable to achieve various 2D deformations and 2D-to-3D deformations, and integrate multiple properties, including customizable structures and deformations, active reversible deformation, rapid reversible shape locking, adjustable energy storing and stretchability, which could open a new application avenue in soft robotics and flexible electronics.

Self-protection soft fluidic robots with rapid large-area self-healing capabilities.

Soft fluidic robots have attracted a lot of attention and have broad application prospects. However, poor fluidic power source and easy to damage have been hindering their development, while the lack of intelligent self-protection also brings inconvenience to their applications. Here, we design diversified self-protection soft fluidic robots that integrate soft electrohydrodynamic pumps, actuators, healing electrofluids, and E-skins. We develop high-performance soft electrohydrodynamic pumps, enabling high-speed actuation and large deformation of untethered soft fluidic robots. A healing electrofluid that can form a self-healed film with excellent stretchability and strong adhesion is synthesized, which can achieve rapid and large-areas-damage self-healing of soft materials. We propose multi-functional E-skins to endow robots intelligence, making robots realize a series of self-protection behaviors. Moreover, our robots allow their functionality to be enhanced by the combination of electrodes or actuators. This design strategy enables soft fluidic robots to achieve their high-speed actuation and intelligent self-protection, opening a door for soft robots with physical intelligence.

Direct Writing Corrugated PVC Gel Artificial Muscle via Multi-Material Printing Processes.

Electroactive PVC gel is a new artificial muscle material with good performance that can mimic the movement of biological muscle in an electric field. However, traditional manufacturing methods, such as casting, prevent the broad application of this promising material because they cannot achieve the integration of the PVC gel electrode and core layer, and at the same time, it is difficult to create complex and diverse structures. In this study, a multi-material, integrated direct writing method is proposed to fabricate corrugated PVC gel artificial muscle. Inks with suitable rheological properties were developed for printing four functional layers, including core layers, electrode layers, sacrificial layers, and insulating layers, with different characteristics. The curing conditions of the printed CNT/SMP inks under different applied conditions were also discussed. The structural parameters were optimized to improve the actuating performance of the PVC gel artificial muscle. The corrugated PVC gel with a span of 1.6 mm had the best actuating performance. Finally, we printed three layers of corrugated PVC gel artificial muscle with good actuating performance. The proposed method can help to solve the inherent shortcomings of traditional manufacturing methods of PVC gel actuators. The printed structures have potential applications in many fields, such as soft robotics and flexible electronic devices.

A Bioinspired Stress-Response Strategy for High-Speed Soft Grippers.

The stress-response strategy is one of the nature's greatest developments, enabling animals and plants to respond quickly to environmental stimuli. One example is the stress-response strategy of the Venus flytrap, which enables such a delicate plant to perceive and prey on insects at an imperceptible speed by their soft terminal lobes. Here, inspired by this unique stress-response strategy, a soft gripper that aims at the challenges of high-speed dynamic grasping tasks is presented. The gripper, called high-speed soft gripper (HSG), is based on two basic design concepts. One is a snap-through instability that enables the HSG to sense the mechanical stimuli and actuating instantly. The other one is the spider-inspired pneumatic-powered control system that makes the trigger process repeatable and controllable. Utilizing the stress-response strategy, the HSG can accomplish high-speed sensing and grasping and handle a dynamic grasping task like catching a thrown baseball. Whereas soft machines typically exhibit slow locomotion speed and low manipulation strength for the intrinsic limitations of soft materials, the exploration of the stress-response strategy in this study can help pave the way for designing a new generation of practical high-speed soft robots.

Customizing a self-healing soft pump for robot.

Recent advances in soft materials enable robots to possess safer human-machine interaction ways and adaptive motions, yet there remain substantial challenges to develop universal driving power sources that can achieve performance trade-offs between actuation, speed, portability, and reliability in untethered applications. Here, we introduce a class of fully soft electronic pumps that utilize electrical energy to pump liquid through electrons and ions migration mechanism. Soft pumps combine good portability with excellent actuation performances. We develop special functional liquids that merge unique properties of electrically actuation and self-healing function, providing a direction for self-healing fluid power systems. Appearances and pumpabilities of soft pumps could be customized to meet personalized needs of diverse robots. Combined with a homemade miniature high-voltage power converter, two different soft pumps are implanted into robotic fish and vehicle to achieve their untethered motions, illustrating broad potential of soft pumps as universal power sources in untethered soft robotics.

Transparent, Flexible, Penetrating Microelectrode Arrays with Capabilities of Single-Unit Electrophysiology.

Accurately mapping neuronal activity across brain networks is critical to understand behaviors, yet it is very challenging due to the need of tools with both high spatial and temporal resolutions. Here, penetrating arrays of flexible microelectrodes made of low-impedance nanomeshes are presented, which are capable of recording single-unit electrophysiological neuronal activity and at the same time, transparent, allowing to bridge electrical and optical brain mapping modalities. These 32 transparent penetrating electrodes with site area, 225 µm2 , have a low impedance of ≈149 kΩ at 1 kHz, an adequate charge injection limit of ≈0.76 mC cm-2 , and up to 100% yield. Mechanical bending tests reveal that the array is robust up to 1000 bending cycles, and its high transmittance of 67% at 550 nm makes it suitable for combining with various optical methods. A temporary stiffening using polyethylene glycol allows the penetrating nanomesh arrays to be inserted into the brain minimally invasively, with in vivo validation of recordings of spontaneous and evoked single-unit activity of neurons across layers of the mouse visual cortex. Together, these results establish a novel neurotechnology-transparent, flexible, penetrating microelectrode arrays-which possesses great potential for brain research.

Imaging Sodium Flux during Action Potentials in Neurons with Fluorescent Nanosensors and Transparent Microelectrodes.

Sodium flux plays a pivotal role in neurobiological processes including initiation of action potentials and regulation of neuronal cell excitability. However, unlike the wide range of fluorescent calcium indicators used extensively for cellular studies, the choice of sodium probes remains limited. We have previously demonstrated optode-based nanosensors (OBNs) for detecting sodium ions with advantageous modular properties such as tunable physiological sensing range, full reversibility, and superb selectivity against key physiological interfering ion potassium. (1) Motivated by bridging the gap between the great interest in sodium imaging of neuronal cell activity as an alternative to patch clamp and limited choices of optical sodium indicators, in this Letter we report the application of nanosensors capable of detecting intracellular sodium flux in isolated rat dorsal root ganglion neurons during electrical stimulation using transparent microelectrodes. Taking advantage of the ratiometric detection scheme offered by this fluorescent modular sensing platform, we performed dual color imaging of the sensor to monitor the intracellular sodium currents underlying trains of action potentials in real time. The combination of nanosensors and microelectrodes for monitoring neuronal sodium dynamics is a novel tool for investigating the regulatory role of sodium ions involved during neural activities.

Transparent arrays of bilayer-nanomesh microelectrodes for simultaneous electrophysiology and two-photon imaging in the brain.

Transparent microelectrode arrays have emerged as increasingly important tools for neuroscience by allowing simultaneous coupling of big and time-resolved electrophysiology data with optically measured, spatially and type resolved single neuron activity. Scaling down transparent electrodes to the length scale of a single neuron is challenging since conventional transparent conductors are limited by their capacitive electrode/electrolyte interface. In this study, we establish transparent microelectrode arrays with high performance, great biocompatibility, and comprehensive in vivo validations from a recently developed, bilayer-nanomesh material composite, where a metal layer and a low-impedance faradaic interfacial layer are stacked reliably together in a same transparent nanomesh pattern. Specifically, flexible arrays from 32 bilayer-nanomesh microelectrodes demonstrated near-unity yield with high uniformity, excellent biocompatibility, and great compatibility with state-of-the-art wireless recording and real-time artifact rejection system. The electrodes are highly scalable, with 130 kilohms at 1 kHz at 20 µm in diameter, comparable to the performance of microelectrodes in nontransparent Michigan arrays. The highly transparent, bilayer-nanomesh microelectrode arrays allowed in vivo two-photon imaging of single neurons in layer 2/3 of the visual cortex of awake mice, along with high-fidelity, simultaneous electrical recordings of visual-evoked activity, both in the multi-unit activity band and at lower frequencies by measuring the visual-evoked potential in the time domain. Together, these advances reveal the great potential of transparent arrays from bilayer-nanomesh microelectrodes for a broad range of utility in neuroscience and medical practices.

Capacitively Coupled Arrays of Multiplexed Flexible Silicon Transistors for Long-Term Cardiac Electrophysiology.

Advanced capabilities in electrical recording are essential for the treatment of heart-rhythm diseases. The most advanced technologies use flexible integrated electronics; however, the penetration of biological fluids into the underlying electronics and any ensuing electrochemical reactions pose significant safety risks. Here, we show that an ultrathin, leakage-free, biocompatible dielectric layer can completely seal an underlying layer of flexible electronics while allowing for electrophysiological measurements through capacitive coupling between tissue and the electronics, and thus without the need for direct metal contact. The resulting current-leakage levels and operational lifetimes are, respectively, four orders of magnitude smaller and between two and three orders of magnitude longer than those of any other flexible-electronics technology. Systematic electrophysiological studies with normal, paced and arrhythmic conditions in Langendorff hearts highlight the capabilities of the capacitive-coupling approach. Our technology provides a realistic pathway towards the broad applicability of biocompatible, flexible electronic implants.