A compact, sample-in-atmospheric-pressure soft x-ray microscope developed at Pohang Light Source.

ABSTRACT

A full-field transmission soft x-ray microscope (TXM) was developed at the Pohang Light Source. With a 2 mm diameter condenser zone plate and a 40 nm outermost-zone-width objective zone plate, the TXM's achieved spatial resolution is better than 50 nm at the photon energy of 500 eV (wavelength 2.49 nm). The TXM is portable and mounted in tandem with a 7B1 spectroscopy end station. The sample position is outside the vacuum, allowing for quick sample changes and enhanced in situ experimental capability. In addition, the TXM is pinhole-free and easy to align, having commercial mounts located outside the vacuum components.