M³: Microscope-based maskless micropatterning with dry film photoresist.
Biomed Microdevices
; 13(2): 375-81, 2011 Apr.
Article
em En
| MEDLINE
| ID: mdl-21190086
ABSTRACT
We present a maskless micropatterning system that utilizes a fluorescence microscope with programmable X-Y stage and dry film photoresist to realize feature sizes in the sub-millimeter range (40-700 µm). The method allows for flexible in-house maskless photolithography without a dedicated microfabrication facility and is well-suited for rapid prototyping of microfluidic channels, scaffold templates for protein/cell patterning or optically-guided cell encapsulation for biomedical applications.
Texto completo:
1
Coleções:
01-internacional
Base de dados:
MEDLINE
Assunto principal:
Microtecnologia
/
Luz
/
Microscopia de Fluorescência
Idioma:
En
Revista:
Biomed Microdevices
Assunto da revista:
ENGENHARIA BIOMEDICA
Ano de publicação:
2011
Tipo de documento:
Article
País de afiliação:
Estados Unidos