Influence of parasitic capacitance on output voltage for series-connected thin-film piezoelectric devices.
Sensors (Basel)
; 12(12): 16673-84, 2012 Dec 04.
Article
em En
| MEDLINE
| ID: mdl-23211754
ABSTRACT
Series-connected thin film piezoelectric elements can generate large output voltages. The output voltage ideally is proportional to the number of connections. However, parasitic capacitances formed by the insulation layers and derived from peripheral circuitry degrade the output voltage. Conventional circuit models are not suitable for predicting the influence of the parasitic capacitance. Therefore we proposed the simplest model of piezoelectric elements to perform simulation program with integrated circuit emphasis (SPICE) circuit simulations). The effects of the parasitic capacitances on the thin-film Pb(Zr, Ti)O(3), (PZT) elements connected in series on a SiO(2) insulator are demonstrated. The results reveal the negative effect on the output voltage caused by the parasitic capacitances of the insulation layers. The design guidelines for the devices using series-connected piezoelectric elements are explained.
Texto completo:
1
Coleções:
01-internacional
Base de dados:
MEDLINE
Assunto principal:
Dióxido de Silício
/
Capacitância Elétrica
/
Desenho de Equipamento
Tipo de estudo:
Prognostic_studies
Idioma:
En
Revista:
Sensors (Basel)
Ano de publicação:
2012
Tipo de documento:
Article
País de afiliação:
Japão