Fabrication and analysis of single-crystal KTiOPO4 films with thicknesses in the micrometer range.
Opt Lett
; 41(3): 607-9, 2016 Feb 01.
Article
em En
| MEDLINE
| ID: mdl-26907435
ABSTRACT
Single-crystal potassium titanyl phosphate (KTiOPO4, KTP) films with thicknesses less than 5 µm are obtained by using helium (He) implantation combined with ion-beam-enhanced etching. A heavily damaged layer created by a 4×10(16) cm(-2) fluence of 2 MeV He implantation is removed by means of wet chemical etching in hydrofluoric acid (HF). Thus, free-standing films of KTP with thicknesses in the range of 3-5 µm are obtained. The etching rate can be adjusted over a wide range by choosing temperature and HF concentration, as well as annealing conditions. Sharp etching edges and the smooth surface of the film indicate that a high selective-etching rate is achieved in the damaged layer, and the remaining part of the crystal is undamaged. X-ray and Raman-scattering results prove that KTP films have good single-crystal properties.
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01-internacional
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MEDLINE
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En
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Opt Lett
Ano de publicação:
2016
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Article