Spatial characterization of nanotextured surfaces by visual color imaging.
Appl Opt
; 55(34): 9719-9723, 2016 Dec 01.
Article
em En
| MEDLINE
| ID: mdl-27958461
ABSTRACT
We present a method using an ordinary color camera to characterize nanostructures from the visual color of the structures. The method provides a macroscale overview image from which micrometer-sized regions can be analyzed independently, hereby revealing long-range spatial variations of the structures. The method is tested on injection-molded polymer line gratings, and the height and filling factor are determined with confidence intervals similar to more advanced imaging scatterometry setups.
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1
Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Appl Opt
Ano de publicação:
2016
Tipo de documento:
Article