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Speciation of CuCl and CuCl2 Thiol-Amine Solutions and Characterization of Resulting Films: Implications for Semiconductor Device Fabrication.
Murria, Priya; Miskin, Caleb K; Boyne, Robert; Cain, Laurance T; Yerabolu, Ravikiran; Zhang, Ruihong; Wegener, Evan C; Miller, Jeffrey T; Kenttämaa, Hilkka I; Agrawal, Rakesh.
Afiliação
  • Murria P; Department of Chemistry, Purdue University , 560 Oval Drive, West Lafayette, Indiana 47907, United States.
  • Miskin CK; Davidson School of Chemical Engineering, Purdue University , 480 Stadium Mall Drive, West Lafayette, Indiana 47907, United States.
  • Boyne R; Davidson School of Chemical Engineering, Purdue University , 480 Stadium Mall Drive, West Lafayette, Indiana 47907, United States.
  • Cain LT; Department of Chemistry, Purdue University , 560 Oval Drive, West Lafayette, Indiana 47907, United States.
  • Yerabolu R; Department of Chemistry, Purdue University , 560 Oval Drive, West Lafayette, Indiana 47907, United States.
  • Zhang R; School of Materials Engineering, Purdue University , West Lafayette, Indiana 47907, United States.
  • Wegener EC; Davidson School of Chemical Engineering, Purdue University , 480 Stadium Mall Drive, West Lafayette, Indiana 47907, United States.
  • Miller JT; Davidson School of Chemical Engineering, Purdue University , 480 Stadium Mall Drive, West Lafayette, Indiana 47907, United States.
  • Kenttämaa HI; Department of Chemistry, Purdue University , 560 Oval Drive, West Lafayette, Indiana 47907, United States.
  • Agrawal R; Davidson School of Chemical Engineering, Purdue University , 480 Stadium Mall Drive, West Lafayette, Indiana 47907, United States.
Inorg Chem ; 56(23): 14396-14407, 2017 Dec 04.
Article em En | MEDLINE | ID: mdl-29131598
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Revista: Inorg Chem Ano de publicação: 2017 Tipo de documento: Article País de afiliação: Estados Unidos
Texto completo
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PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Revista: Inorg Chem Ano de publicação: 2017 Tipo de documento: Article País de afiliação: Estados Unidos