Development of 1.2-GHz ECR ion source and Wien filter for inexpensive ion beam processing system.

Asaji, Toyohisa; Uyama, Hiroya; Umetsugu, Takuro; Nakamura, Tsubasa; Hitobo, Takeshi; Kato, Yushi

Asaji, Toyohisa; Uyama, Hiroya; Umetsugu, Takuro; Nakamura, Tsubasa; Hitobo, Takeshi; Kato, Yushi.

Afiliação

Asaji T; National Institute of Technology, Toyama College, 13 Hongo-machi, Toyama City, Toyama 939-8630, Japan.
Uyama H; National Institute of Technology, Toyama College, 13 Hongo-machi, Toyama City, Toyama 939-8630, Japan.
Umetsugu T; National Institute of Technology, Toyama College, 13 Hongo-machi, Toyama City, Toyama 939-8630, Japan.
Nakamura T; National Institute of Technology, Oshima College, 1091-1 Komatsu, Suouoshima, Yamaguchi 742-2193, Japan.
Hitobo T; Tateyama Machine Co., Ltd., 30 Shimonoban, Toyama City, Toyama 930-1305, Japan.
Kato Y; Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.

Rev Sci Instrum ; 90(12): 123508, 2019 Dec 01.

Article em En | MEDLINE | ID: mdl-31893797

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Rev Sci Instrum Ano de publicação: 2019 Tipo de documento: Article País de afiliação: Japão

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