Effects of Anisotropy on Single Crystal Silicon in Polishing Non-Continuous Surface.

Wang, Guilian; Feng, Zhijian; Hu, Yahui; Liu, Jie; Zheng, Qingchun

Wang, Guilian; Feng, Zhijian; Hu, Yahui; Liu, Jie; Zheng, Qingchun.

Afiliação

Wang G; Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, School of Mechanical Engineering, Tianjin University of Technology, Tianjin 300384, China.
Feng Z; National Demonstration Center for Experimental Mechanical and Electrical Engineering Education, Tianjin University of Technology, Tianjin 300384, China.
Hu Y; Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, School of Mechanical Engineering, Tianjin University of Technology, Tianjin 300384, China.
Liu J; National Demonstration Center for Experimental Mechanical and Electrical Engineering Education, Tianjin University of Technology, Tianjin 300384, China.
Zheng Q; Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, School of Mechanical Engineering, Tianjin University of Technology, Tianjin 300384, China.

Micromachines (Basel) ; 11(8)2020 Jul 30.

Article em En | MEDLINE | ID: mdl-32751578

Palavras-chave

anisotropy; non-continuous surface; polishing; single crystal silicon

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2020 Tipo de documento: Article País de afiliação: China

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