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Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure.
Setiono, Andi; Fahrbach, Michael; Deutschinger, Alexander; Fantner, Ernest J; Schwalb, Christian H; Syamsu, Iqbal; Wasisto, Hutomo Suryo; Peiner, Erwin.
Afiliação
  • Setiono A; Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
  • Fahrbach M; Research Center for Physics, Indonesian Institute of Sciences (LIPI), Tangerang Selatan 15314, Indonesia.
  • Deutschinger A; Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
  • Fantner EJ; SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria.
  • Schwalb CH; SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria.
  • Syamsu I; GETec Microscopy GmbH, 1220 Vienna, Austria.
  • Wasisto HS; Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
  • Peiner E; Research Center for Electronics and Telecommunication, Indonesian Institute of Sciences (LIPI), Jl. Sangkuriang-Komplek LIPI Gedung 20, Bandung 40135, Indonesia.
Sensors (Basel) ; 21(12)2021 Jun 14.
Article em En | MEDLINE | ID: mdl-34198533
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Sistemas Microeletromecânicos Idioma: En Revista: Sensors (Basel) Ano de publicação: 2021 Tipo de documento: Article País de afiliação: Alemanha
Texto completo
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XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Sistemas Microeletromecânicos Idioma: En Revista: Sensors (Basel) Ano de publicação: 2021 Tipo de documento: Article País de afiliação: Alemanha