Room Temperature Deposition of Nanocrystalline SiC Thin Films by DCMS/HiPIMS Co-Sputtering Technique.

Tiron, Vasile; Ursu, Elena-Laura; Cristea, Daniel; Bulai, Georgiana; Stoian, George; Matei, Teodora; Velicu, Ioana-Laura

Tiron, Vasile; Ursu, Elena-Laura; Cristea, Daniel; Bulai, Georgiana; Stoian, George; Matei, Teodora; Velicu, Ioana-Laura.

Afiliação

Tiron V; Department of Exact and Natural Sciences, Research Center on Advanced Materials and Technologies (RAMTECH), Institute of Interdisciplinary Research, Alexandru Ioan Cuza University of Iasi, 700506 Iasi, Romania.
Ursu EL; Centre of Advanced Research in Bionanoconjugates and Biopolymers, Petru Poni Institute of Macromolecular Chemistry, 700487 Iasi, Romania.
Cristea D; Department of Materials Science, Faculty of Materials Science and Engineering, Transilvania University, 500068 Brasov, Romania.
Bulai G; Science Department, Integrated Center of Environmental Science Studies in the North-Eastern Development Region (CERNESIM), Institute of Interdisciplinary Research, Alexandru Ioan Cuza University of Iasi, 700506 Iasi, Romania.
Stoian G; National Institute of Research and Development for Technical Physics, 700050 Iasi, Romania.
Matei T; Faculty of Physics, Alexandru Ioan Cuza University of Iasi, 700506 Iasi, Romania.
Velicu IL; Faculty of Physics, Alexandru Ioan Cuza University of Iasi, 700506 Iasi, Romania.

Nanomaterials (Basel) ; 12(3)2022 Feb 01.

Article em En | MEDLINE | ID: mdl-35159857

Palavras-chave

DCMS/HiPIMS co-sputtering; adhesion; coating; hardness; nanocrystalline silicon carbide

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Romênia

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