Electrochemical Strategy for High-Resolution Nanostructures in Laser-Heat-Mode Resist Toward Next Generation Diffractive Optical Elements.
Small
; 18(17): e2200249, 2022 Apr.
Article
em En
| MEDLINE
| ID: mdl-35318800
ABSTRACT
For achieving high-resolution nanostructures for next-generation diffractive optical elements (DOEs) using an environmentally friendly process, an electrochemical development strategy is proposed and developed using AgInSbTe-based laser heat-mode resist (AIST-LHR). Based on the electrical resistivity difference of amorphous and crystalline phases for this resist, an etching selectivity ratio of ≈301 (i.e., the etch ratio between the amorphous and crystalline ones) is achieved through the oxidation of Fe3+ ions with the assisted pitting activation etching using Cl- ions in an acid medium. Nanostructures with a minimum feature size down to 41 nm are successfully generated, including grating patterns, meta-surface optical structures, gears, and English characters. Using a post-plasma etching process, the nanostructures are successfully transferred from the AIST-HLR onto silica substrate, and X-ray grating patterns with a line space of 80 nm are created as a demonstration for its potential applications in DOEs.
Texto completo:
1
Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Small
Assunto da revista:
ENGENHARIA BIOMEDICA
Ano de publicação:
2022
Tipo de documento:
Article
País de afiliação:
China