Laser slice thinning of GaN-on-GaN high electron mobility transistors.

Tanaka, Atsushi; Sugiura, Ryuji; Kawaguchi, Daisuke; Wani, Yotaro; Watanabe, Hirotaka; Sena, Hadi; Ando, Yuto; Honda, Yoshio; Igasaki, Yasunori; Wakejima, Akio; Ando, Yuji; Amano, Hiroshi

Tanaka, Atsushi; Sugiura, Ryuji; Kawaguchi, Daisuke; Wani, Yotaro; Watanabe, Hirotaka; Sena, Hadi; Ando, Yuto; Honda, Yoshio; Igasaki, Yasunori; Wakejima, Akio; Ando, Yuji; Amano, Hiroshi.

Afiliação

Tanaka A; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan. a_tanaka@nuee.nagoya-u.ac.jp.
Sugiura R; National Institute for Materials Science, Tsukuba, 987-6543, Japan. a_tanaka@nuee.nagoya-u.ac.jp.
Kawaguchi D; Research & Development Department, Electron Tube Division, Hamamatsu Photonics K. K., Shizuoka, 438-0193, Japan.
Wani Y; Research & Development Department, Electron Tube Division, Hamamatsu Photonics K. K., Shizuoka, 438-0193, Japan.
Watanabe H; Research & Development Department, Electron Tube Division, Hamamatsu Photonics K. K., Shizuoka, 438-0193, Japan.
Sena H; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan.
Ando Y; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan.
Honda Y; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan.
Igasaki Y; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan.
Wakejima A; Research & Development Department, Electron Tube Division, Hamamatsu Photonics K. K., Shizuoka, 438-0193, Japan.
Ando Y; Department of Electrical and Mechanical Engineering, Nagoya Institute of Technology, Aichi, 466-8555, Japan.
Amano H; Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Aichi, 464-8601, Japan.

Sci Rep ; 12(1): 7363, 2022 May 05.

Article em En | MEDLINE | ID: mdl-35513412

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sci Rep Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Japão

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