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Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process.
Sun, Quanquan; Tang, Jiaxuan; Shen, Lifeng; Lan, Jie; Shen, Zhenfeng; Xiao, Junfeng; Chen, Xiao; Zhang, Jianguo; Wu, Yu; Xu, Jianfeng; Wang, Xuefang.
Afiliação
  • Sun Q; Shanghai Aerospace Control Technology Institute, Shanghai 201109, China.
  • Tang J; State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
  • Shen L; Shanghai Aerospace Control Technology Institute, Shanghai 201109, China.
  • Lan J; Shanghai Aerospace Control Technology Institute, Shanghai 201109, China.
  • Shen Z; Shanghai Aerospace Control Technology Institute, Shanghai 201109, China.
  • Xiao J; State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
  • Chen X; School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China.
  • Zhang J; State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
  • Wu Y; State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
  • Xu J; State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
  • Wang X; State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
Micromachines (Basel) ; 13(6)2022 Jun 06.
Article em En | MEDLINE | ID: mdl-35744513

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: China

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: China