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Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath.
Seong, Inho; Kim, Sijun; Lee, Youngseok; Cho, Chulhee; Lee, Jangjae; Jeong, Wonnyoung; You, Yebin; You, Shinjae.
Afiliação
  • Seong I; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Korea.
  • Kim S; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Korea.
  • Lee Y; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Korea.
  • Cho C; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Korea.
  • Lee J; Samsung Electronics, Hwaseong-si 18448, Korea.
  • Jeong W; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Korea.
  • You Y; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Korea.
  • You S; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Korea.
Sensors (Basel) ; 22(16)2022 Aug 20.
Article em En | MEDLINE | ID: mdl-36016029
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2022 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2022 Tipo de documento: Article