Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography.

Hu, Ziyu; Zhao, Rongbo; Wang, Xiaolin; Tao, Peipei; Wang, Qianqian; Wang, Yimeng; Xu, Hong; He, Xiangming

Hu, Ziyu; Zhao, Rongbo; Wang, Xiaolin; Tao, Peipei; Wang, Qianqian; Wang, Yimeng; Xu, Hong; He, Xiangming.

Afiliação

Hu Z; Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China.
Zhao R; Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China.
Wang X; Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China.
Tao P; Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China.
Wang Q; Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China.
Wang Y; Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China.
Xu H; Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China.
He X; Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China.

ACS Omega ; 8(4): 3992-3997, 2023 Jan 31.

Article em En | MEDLINE | ID: mdl-36743030

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Revista: ACS Omega Ano de publicação: 2023 Tipo de documento: Article País de afiliação: China

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