MEMS Resonant Cantilevers for High-Performance Thermogravimetric Analysis of Chemical Decomposition.

Cao, Zhi; Jia, Hao; Zhou, Yufan; Li, Ming; Xu, Pengcheng; Li, Xinxin; Zheng, Dan

Cao, Zhi; Jia, Hao; Zhou, Yufan; Li, Ming; Xu, Pengcheng; Li, Xinxin; Zheng, Dan.

Afiliação

Cao Z; School of Chemical and Environmental Engineering, Shanghai Institute of Technology, Shanghai 201418, China.
Jia H; State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Zhou Y; State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Li M; School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China.
Xu P; State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Li X; School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China.
Zheng D; State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.

Sensors (Basel) ; 23(13)2023 Jul 04.

Article em En | MEDLINE | ID: mdl-37447995

Palavras-chave

MEMS; TGA; heating rate; resonant cantilever; thermal lag

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2023 Tipo de documento: Article País de afiliação: China

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